Authors:
Fritze, M
Burns, J
Wyatt, PW
Chen, CK
Gouker, P
Chen, CL
Keast, C
Astolfi, D
Yost, D
Preble, D
Curtis, A
Davis, P
Cann, S
Deneault, S
Liu, HY
Citation: M. Fritze et al., Sub-100 nm silicon on insulator complimentary metal-oxide semiconductor transistors by deep ultraviolet optical lithography, J VAC SCI B, 18(6), 2000, pp. 2886-2890
Authors:
Fritze, M
Astolfi, DK
Yost, DRW
Wyatt, PW
Liu, HY
Forte, T
Davis, P
Curtis, A
Preble, D
Cann, S
Denault, S
Shaw, J
Sullivan, N
Brandom, R
Mastovich, M
Citation: M. Fritze et al., Chromeless phase-shift masks used for sub-100nm SOICMOS transistors, SOL ST TECH, 43(7), 2000, pp. 116
Authors:
Schwank, JR
Shaneyfelt, MR
Dodd, PE
Burns, JA
Keast, CL
Wyatt, PW
Citation: Jr. Schwank et al., New insights into fully-depleted SOI transistor response after total-dose irradiation, IEEE NUCL S, 47(3), 2000, pp. 604-612