Authors: TOMPA GS BREILAND WG GURARY A ZAWADZKI PA EVANS GH ESHERICK P KROLL B STALL RA

Citation: Gs. Tompa et al., LARGE-AREA, PRODUCTION MOCVD ROTATING-DISK REACTOR DEVELOPMENT AND CHARACTERISTICS, Microelectronics, 25(8), 1994, pp. 757-765

Authors: GURARY AI TOMPA GS THOMPSON AG STALL RA ZAWADZKI PA SCHUMAKER NE

Citation: Ai. Gurary et al., THERMAL AND FLOW ISSUES IN THE DESIGN OF METALORGANIC CHEMICAL-VAPOR-DEPOSITION REACTORS, Journal of crystal growth, 145(1-4), 1994, pp. 642-649

Authors: TOMPA GS ZAWADZKI PA MOY K MCKEE M THOMPSON AG GURARY AI WOLAK E ESHERICK P BREILAND WG EVANS GH BULITKA N HENNESSY J MOORE CJL

Citation: Gs. Tompa et al., DESIGN AND OPERATING CHARACTERISTICS OF A METALORGANIC VAPOR-PHASE EPITAXY PRODUCTION SCALE, VERTICAL, HIGH-SPEED, ROTATING-DISK REACTOR, Journal of crystal growth, 145(1-4), 1994, pp. 655-661