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Authors: KRATSCHMER E KIM HS THOMSON MGR LEE KY RISHTON SA YU ML ZOLGHARNAIN S HUSSEY BW CHANG THP

Citation: E. Kratschmer et al., EXPERIMENTAL EVALUATION OF A 20X20 MM FOOTPRINT MICROCOLUMN, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3792-3796

Authors: CHANG THP THOMSON MGR YU ML KRATSCHMER E KIM HS LEE KY RISHTON SA ZOLGHARNAIN S

Citation: Thp. Chang et al., ELECTRON-BEAM TECHNOLOGY - SEM TO MICROCOLUMN, Microelectronic engineering, 32(1-4), 1996, pp. 113-130

Authors: ZOLGHARNAIN S LEE KY RISHTON SA KISKER D CHANG THP

Citation: S. Zolgharnain et al., CHARACTERIZATION OF A GAAS METAL-SEMICONDUCTOR-METAL LOW-ENERGY-ELECTRON DETECTOR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2556-2560

Authors: LEE KY LABIANCA N RISHTON SA ZOLGHARNAIN S GELORME JD SHAW J CHANG THP

Citation: Ky. Lee et al., MICROMACHINING APPLICATIONS OF A HIGH-RESOLUTION ULTRATHICK PHOTORESIST, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3012-3016