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Results: 1-3 |
Results: 3
A methodology and associated CAD tools for support of concurrent design ofMEMS
Authors: Romanowicz, BF Zaman, MH Bart, SF Rabinovich, VL Tchertkov, I Zhang, S da Silva, MG Deshpande, M Greiner, K Gilbert, JR Cunningham, S
Citation: Bf. Romanowicz et al., A methodology and associated CAD tools for support of concurrent design ofMEMS, CMES-COMP M, 1(1), 2000, pp. 45-63
Automatic generation of thin film process flows - Part I: Basic algorithms
Authors: Zaman, MH Carlen, ET Mastrangelo, CH
Citation: Mh. Zaman et al., Automatic generation of thin film process flows - Part I: Basic algorithms, IEEE SEMIC, 12(1), 1999, pp. 116-128
Automatic generation of thin film process flows - Part II: Recipe generation, flow evaluation, and system framework
Authors: Zaman, MH Carlen, ET Mastrangelo, CH
Citation: Mh. Zaman et al., Automatic generation of thin film process flows - Part II: Recipe generation, flow evaluation, and system framework, IEEE SEMIC, 12(1), 1999, pp. 129-138
Risultati: 1-3 |