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Results: 1-16 |
Results: 16
Review of pendeo-epitaxial growth and characterization of thin films of GaN and AlGaN alloys on 6H-SiC(0001) and Si(111) substrates
Authors: Davis, RF Gehrke, T Linthicum, KJ Rajagopal, P Roskowski, AM Zheleva, T Preble, EA Zorman, CA Mehregany, M Schwarz, U Schuck, J Grober, R
Citation: Rf. Davis et al., Review of pendeo-epitaxial growth and characterization of thin films of GaN and AlGaN alloys on 6H-SiC(0001) and Si(111) substrates, MRS I J N S, 6(14), 2001, pp. 1-16
On the stability of beta-SiC with respect to chemical disorder induced by irradiation with energetic particles
Authors: Grigull, S Ishimaru, M Nastasi, M Zorman, CA Mehregany, M
Citation: S. Grigull et al., On the stability of beta-SiC with respect to chemical disorder induced by irradiation with energetic particles, PHIL MAG L, 81(2), 2001, pp. 55-61
Surface micromachining: A brief introduction
Authors: Mehregany, M Zorman, CA
Citation: M. Mehregany et Ca. Zorman, Surface micromachining: A brief introduction, MRS BULL, 26(4), 2001, pp. 289-290
Pendeo-epitaxial growth and characterization of thin films of gallium nitride and related materials on SiC(0001) and si(111) substrates
Authors: Davis, RF Gehrke, T Linthicum, KJ Zheleva, TS Rajagopal, P Zorman, CA Mehregany, M
Citation: Rf. Davis et al., Pendeo-epitaxial growth and characterization of thin films of gallium nitride and related materials on SiC(0001) and si(111) substrates, Z METALLKUN, 92(2), 2001, pp. 163-166
Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization
Authors: Davis, RF Gehrke, T Linthicum, KJ Zheleva, TS Preble, EA Rajagopal, P Zorman, CA Mehregany, M
Citation: Rf. Davis et al., Pendeo-epitaxial growth of thin films of gallium nitride and related materials and their characterization, J CRYST GR, 225(2-4), 2001, pp. 134-140
Monocrystalline silicon carbide nanoelectromechanical systems
Authors: Yang, YT Ekinci, KL Huang, XMH Schiavone, LM Roukes, ML Zorman, CA Mehregany, M
Citation: Yt. Yang et al., Monocrystalline silicon carbide nanoelectromechanical systems, APPL PHYS L, 78(2), 2001, pp. 162-164
Pendeo-epitaxial growth and characterization of GaN and related materials on (6H-SiC(0001) and Si(111) substrates
Authors: Davis, RF Gehrke, T Linthicum, KJ Zheleva, TS Rajagopal, P Zorman, CA Mehregany, M
Citation: Rf. Davis et al., Pendeo-epitaxial growth and characterization of GaN and related materials on (6H-SiC(0001) and Si(111) substrates, MRS I J N S, 5, 2000, pp. NIL_46-NIL_57
Silicon carbide for microelectromechanical systems
Authors: Mehregany, M Zorman, CA Roy, S Fleischman, AJ Wu, CH Rajan, N
Citation: M. Mehregany et al., Silicon carbide for microelectromechanical systems, INT MATER R, 45(3), 2000, pp. 85-108
An in situ heating study of hydrogen-containing adsorbates on polycrystalline diamond surfaces using elastic recoil detection
Authors: Zorman, CA Mearini, GT Hoffman, RW
Citation: Ca. Zorman et al., An in situ heating study of hydrogen-containing adsorbates on polycrystalline diamond surfaces using elastic recoil detection, DIAM RELAT, 9(8), 2000, pp. 1518-1523
Fabrication and testing of surface micromachined polycrystalline SiC micromotors
Authors: Yasseen, AA Wu, CH Zorman, CA Mehregany, M
Citation: Aa. Yasseen et al., Fabrication and testing of surface micromachined polycrystalline SiC micromotors, IEEE ELEC D, 21(4), 2000, pp. 164-166
Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO2 and polysilicon
Authors: Yasseen, AA Zorman, CA Mehregany, M
Citation: Aa. Yasseen et al., Surface micromachining of polycrystalline SiC films using microfabricated molds of SiO2 and polysilicon, J MICROEL S, 8(3), 1999, pp. 237-242
Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines
Authors: Rajan, N Mehregany, M Zorman, CA Stefanescu, S Kicher, TP
Citation: N. Rajan et al., Fabrication and testing of micromachined silicon carbide and nickel fuel atomizers for gas turbine engines, J MICROEL S, 8(3), 1999, pp. 251-257
Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD
Authors: Wu, CH Zorman, CA Mehregany, M
Citation: Ch. Wu et al., Growth of polycrystalline SiC films on SiO2 and Si3N4 by APCVD, THIN SOL FI, 356, 1999, pp. 179-183
SiC MEMS: opportunities and challenges for applications in harsh environments
Authors: Mehregany, M Zorman, CA
Citation: M. Mehregany et Ca. Zorman, SiC MEMS: opportunities and challenges for applications in harsh environments, THIN SOL FI, 356, 1999, pp. 518-524
Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries
Authors: Yasseen, AA Zorman, CA Mehregany, M
Citation: Aa. Yasseen et al., Roughness reduction of 3C-SiC surfaces using SiC-based mechanical polishing slurries, J ELCHEM SO, 146(1), 1999, pp. 327-330
MEMS for harsh application environments
Authors: Mehregany, M Zorman, CA
Citation: M. Mehregany et Ca. Zorman, MEMS for harsh application environments, MICROENGINEERING AEROSPACE SYSTEMS, 1999, pp. 119-144
Risultati: 1-16 |