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BORRAS G
VUORINEN K
ODET C
GAFFIOT F
JACQUEMOD G
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Authors:
XIAO ZX
WU GY
ZHANG DC
ZHANG GB
LI ZH
HAO YL
WANG YY
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Citation: Kh. Han et Y. Roh, A STUDY ON THE DESIGN OF A SHEAR-WAVE ULTRASONIC TRANSDUCER CONSIDERING THE EFFECT OF THE SIDE LAYER, Sensors and actuators. A, Physical, 71(1-2), 1998, pp. 127-132
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Citation: I. Zubel, SILICON ANISOTROPIC ETCHING IN ALKALINE-SOLUTIONS II - ON THE INFLUENCE OF ANISOTROPY ON THE SMOOTHNESS OF ETCHED SURFACES, Sensors and actuators. A, Physical, 70(3), 1998, pp. 260-268
Citation: G. Krauter et al., LOW-TEMPERATURE SILICON DIRECT BONDING FOR APPLICATION IN MICROMECHANICS - BONDING ENERGIES FOR DIFFERENT COMBINATIONS OF OXIDES, Sensors and actuators. A, Physical, 70(3), 1998, pp. 271-275
Citation: A. Feustel et al., NUMERICAL-SIMULATION AND OPTIMIZATION OF PLANAR ELECTROMAGNETIC ACTUATORS, Sensors and actuators. A, Physical, 70(3), 1998, pp. 276-282