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Results:
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Results: 16
Authors:
Rusu, C
van't Oever, R
de Boer, MJ
Jansen, HV
Berenschot, JW
Bennink, ML
Kanger, JS
de Grooth, BG
Elwenspoek, M
Greve, J
Brugger, J
van den Berg, A
Citation: C. Rusu et al., Direct integration of micromachined pipettes in a flow channel for single DNA molecule study by optical tweezers, J MICROEL S, 10(2), 2001, pp. 238-246
Authors:
Nijdam, AJ
Gardeniers, JGE
Berenschot, JW
van Veenendaal, E
van Suchtelen, J
Elwenspoek, M
Citation: Aj. Nijdam et al., Influence of the angle between etched (near) Si{111} surfaces and the substrate orientation on the underetch rate during anisotropic wet-chemical etching of silicon, J MICROM M, 11(5), 2001, pp. 499-503
Authors:
Blom, MT
Chmela, E
Gardeniers, JGE
Berenschot, JW
Elwenspoek, M
Tijssen, R
van den Berg, A
Citation: Mt. Blom et al., Local anodic bonding of Kovar to Pyrex aimed at high-pressure, solvent-resistant microfluidic connections, J MICROM M, 11(4), 2001, pp. 382-385
Authors:
Gui, C
Oosterbroek, RE
Berenschot, JW
Schlautmann, S
Lammerink, TSJ
van den Berg, A
Elwenspoek, MC
Citation: C. Gui et al., Selective wafer bonding by surface roughness control, J ELCHEM SO, 148(4), 2001, pp. G225-G228
Authors:
Veenstra, TT
Berenschot, JW
Gardeniers, JGE
Sanders, RGP
Elwenspoek, MC
van den Berg, A
Citation: Tt. Veenstra et al., Use of selective anodic bonding to create micropump chambers with virtually no dead volume, J ELCHEM SO, 148(2), 2001, pp. G68-G72
Authors:
Oosterbroek, RE
Berenschot, JW
Jansen, HV
Nijdam, AJ
Pandraud, G
van den Berg, A
Elwenspoek, MC
Citation: Re. Oosterbroek et al., Etching methodologies in < 111 >-oriented silicon wafers, J MICROEL S, 9(3), 2000, pp. 390-398
Authors:
de Boer, MJ
Tjerkstra, RW
Berenschot, JW
Jansen, HV
Burger, CJ
Gardeniers, JGE
Elwenspoek, M
van den Berg, A
Citation: Mj. De Boer et al., Micromachining of buried micro channels in silicon, J MICROEL S, 9(1), 2000, pp. 94-103
Authors:
Pandraud, G
Veldhuis, G
Berenschot, JW
Nijdam, AJ
Hoekstra, HJWM
Citation: G. Pandraud et al., Micromachining of high-contrast optical waveguides in < 111 > silicon wafers, IEEE PHOTON, 12(3), 2000, pp. 308-310
Authors:
Wensink, H
Jansen, HV
Berenschot, JW
Elwenspoek, MC
Citation: H. Wensink et al., Mask materials for powder blasting, J MICROM M, 10(2), 2000, pp. 175-180
Authors:
Brugger, J
Berenschot, JW
Kuiper, S
Nijdam, W
Otter, B
Elwenspoek, M
Citation: J. Brugger et al., Resistless patterning of sub-micron structures by evaporation through nanostencils, MICROEL ENG, 53(1-4), 2000, pp. 403-405
Authors:
Veldhuis, GJ
Nauta, T
Gui, C
Berenschot, JW
Lambeck, PV
Citation: Gj. Veldhuis et al., Electrostatically actuated mechanooptical waveguide ON-OFF switch showing high extinction at a low actuation-voltage, IEEE S T QU, 5(1), 1999, pp. 60-66
Authors:
Nijdam, AJ
Berenschot, JW
van Suchtelen, J
Gardeniers, JGE
Elwenspoek, M
Citation: Aj. Nijdam et al., Velocity sources as an explanation for experimentally observed variations in Si{111} etch rates, J MICROM M, 9(2), 1999, pp. 135-138
Authors:
Oosterbroek, RE
Berenschot, JW
Schlautmann, S
Krijnen, GJM
Lammerink, TSJ
Elwenspoek, MC
van den Berg, A
Citation: Re. Oosterbroek et al., Designing, simulation and realization of in-plane operating micro valves, using new etching techniques, J MICROM M, 9(2), 1999, pp. 194-198
Authors:
Gui, C
Veldhuis, GJ
Koster, TM
Lambeck, PV
Berenschot, JW
Gardeniers, JGE
Elwenspoek, M
Citation: C. Gui et al., Fabrication of nanomechanical optical devices with aligned wafer bonding, MICROSYST T, 5(3), 1999, pp. 138-143
Authors:
Oosterbroek, RE
Lammerink, TSJ
Berenschot, JW
Krijnen, GJM
Elwenspoek, MC
van den Berg, A
Citation: Re. Oosterbroek et al., A micromachined pressure/flow-sensor, SENS ACTU-A, 77(3), 1999, pp. 167-177
Authors:
Nijdam, AJ
van Suchtelen, J
Berenschot, JW
Gardeniers, JGE
Elwenspoek, M
Citation: Aj. Nijdam et al., Etching of silicon in alkaline solutions: a critical look at the {1 1 1} minimum, J CRYST GR, 199, 1999, pp. 430-434
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