Authors:
Pons, M
Meziere, J
Dedulle, JM
Kuan, SWT
Blanquet, E
Bernard, C
Ferret, P
Di Cioccio, L
Billon, T
Madar, R
Citation: M. Pons et al., Simulation of the large-area growth of homoepitaxial 4H-SiC by chemical vapor deposition, J PHYS IV, 11(PR3), 2001, pp. 1079-1086
Authors:
Neyret, E
Di Cioccio, L
Bluet, JM
Pernot, J
Vicente, P
Anglos, D
Lagadas, M
Billon, T
Citation: E. Neyret et al., Deposition, evaluation and control of 4H and 6H SiC epitaxial layers for device applications, MAT SCI E B, 80(1-3), 2001, pp. 332-336