Authors:
Debal, F
Bretagne, J
Dauchot, JP
Hecq, M
Wautelet, M
Citation: F. Debal et al., On the role of plasma-surface interactions in dc magnetron discharges in Ar-N-2 gas mixtures, PLASMA SOUR, 10(1), 2001, pp. 30-37
Authors:
Debal, F
Wautelet, M
Bretagne, J
Dauchot, JP
Hecq, M
Citation: F. Debal et al., Spatially-resolved spectroscopic optical emission of dc-magnetron sputtering discharges in argon-nitrogen gas mixtures, PLASMA SOUR, 9(2), 2000, pp. 152-160
Citation: Tm. Minea et al., Evolution of the two-dimensional axisymmetric charged particle density in a radio frequency planar magnetron via a PIC-MCC simulation, IEEE PLAS S, 27(1), 1999, pp. 94-95
Citation: M. Touzeau et al., Spectroscopic study and modelling of a reactive magnetron discharge in Ar/O-2 and in air, VACUUM, 52(1-2), 1999, pp. 33-40