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Results: 1-8 |
Results: 8
SYNTHESIS OF SIC MICROSTRUCTURES IN SI TECHNOLOGY BY HIGH-DOSE CARBONIMPLANTATION - ETCH-STOP PROPERTIES
Authors: SERRE C PEREZRODRIGUEZ A ROMANORODRIGUEZ A CALVOBARRIO L MORANTE JR ESTEVE J ACERO MC SKORUPA W KOGLER R
Citation: C. Serre et al., SYNTHESIS OF SIC MICROSTRUCTURES IN SI TECHNOLOGY BY HIGH-DOSE CARBONIMPLANTATION - ETCH-STOP PROPERTIES, Journal of the Electrochemical Society, 144(6), 1997, pp. 2211-2215
DETAILED ANALYSIS OF BETA-SIC FORMATION BY HIGH-DOSE CARBON ION-IMPLANTATION IN SILICON
Authors: ROMANORODRIGUEZ A SERRE C CALVOBARRIO L PEREZRODRIGUEZ A MORANTE JR KOGLER R SKORUPA W
Citation: A. Romanorodriguez et al., DETAILED ANALYSIS OF BETA-SIC FORMATION BY HIGH-DOSE CARBON ION-IMPLANTATION IN SILICON, Materials science & engineering. B, Solid-state materials for advanced technology, 36(1-3), 1996, pp. 282-285
ANALYSIS OF ION-BEAM-INDUCED DAMAGE AND AMORPHIZATION OF 6H-SIC BY RAMAN-SCATTERING
Authors: PEREZRODRIGUEZ A PACAUD Y CALVOBARRIO L SERRE C SKORUPA W MORANTE JR
Citation: A. Perezrodriguez et al., ANALYSIS OF ION-BEAM-INDUCED DAMAGE AND AMORPHIZATION OF 6H-SIC BY RAMAN-SCATTERING, Journal of electronic materials, 25(3), 1996, pp. 541-547
ION-BEAM SYNTHESIS AND RECRYSTALLIZATION OF AMORPHOUS SIGE SIC STRUCTURES/
Authors: PEREZRODRIGUEZ A ROMANORODRIGUEZ A SERRE C CALVOBARRIO L CABEZAS R MORANTE JR CALDERER J REUTHER H SKORUPA W
Citation: A. Perezrodriguez et al., ION-BEAM SYNTHESIS AND RECRYSTALLIZATION OF AMORPHOUS SIGE SIC STRUCTURES/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 120(1-4), 1996, pp. 151-155
HIGH-TEMPERATURE HIGH-DOSE C ION-IMPLANTATION IN EPITAXIAL SIGE
Authors: PEREZRODRIGUEZ A ROMANORODRIGUEZ A SERRE C CALVOBARRIO L CABEZAS R GONZALEZVARONA O MORANTE JR KOGLER R SKORUPA W RODRIGUEZ A
Citation: A. Perezrodriguez et al., HIGH-TEMPERATURE HIGH-DOSE C ION-IMPLANTATION IN EPITAXIAL SIGE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 120(1-4), 1996, pp. 173-176
ION-BEAM-ASSISTED RECRYSTALLIZATION OF SIC SI STRUCTURES/
Authors: PEREZRODRIGUEZ A KOGLER R CALVOBARRIO L SERRE C ROMANORODRIGUEZ A HEERA V SKORUPA W MORANTE JR
Citation: A. Perezrodriguez et al., ION-BEAM-ASSISTED RECRYSTALLIZATION OF SIC SI STRUCTURES/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 334-337
ION-BEAM SYNTHESIS OF AMORPHOUS SIC FILMS - STRUCTURAL-ANALYSIS AND RECRYSTALLIZATION
Authors: SERRE C CALVOBARRIO L PEREZRODRIGUEZ A ROMANORODRIGUEZ A MORANTE JR PACAUD Y KOGLER R HEERA V SKORUPA W
Citation: C. Serre et al., ION-BEAM SYNTHESIS OF AMORPHOUS SIC FILMS - STRUCTURAL-ANALYSIS AND RECRYSTALLIZATION, Journal of applied physics, 79(9), 1996, pp. 6907-6913
ION-BEAM SYNTHESIS OF ALUMINUM NITRIDE - CHARACTERIZATION OF THIN ALNLAYERS FORMED IN MICROELECTRONICS ALUMINUM
Authors: CALVOBARRIO L PEREZRODRIGUEZ A ROMANORODRIGUEZ A MORANTE JR MONTSERRAT J
Citation: L. Calvobarrio et al., ION-BEAM SYNTHESIS OF ALUMINUM NITRIDE - CHARACTERIZATION OF THIN ALNLAYERS FORMED IN MICROELECTRONICS ALUMINUM, Materials science and technology, 11(11), 1995, pp. 1187-1190
Risultati: 1-8 |