Authors:
GAVIGNET E
BALLANDRAS S
BIGLER E
BONJOUR C
RENAUD JC
DANIAU W
Citation: E. Gavignet et al., DESIGN AND FABRICATION OF SURFACE TRANSVE RSE-WAVE RESONATORS WITH THIN METAL STRIPS DEPOSITED ON QUARTZ SUBSTRATES, Journal de physique. III, 6(1), 1996, pp. 105-120
Authors:
DANIAU W
MARIANNEAU G
GIRARDET E
MARGUIER J
Citation: W. Daniau et al., DESIGN AND FABRICATION OF A CAPACITANCE SWITCH ARRAY USABLE ON A DTCXO, IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 43(6), 1996, pp. 1195-1199
Authors:
GAVIGNET E
BALLANDRAS S
BIGLER E
BONJOUR C
RENAUD JC
DANIAU W
Citation: E. Gavignet et al., ANALYSIS AND EXPERIMENTAL-STUDY OF SURFACE TRANSVERSE-WAVE RESONATORSON QUARTZ, Journal of applied physics, 79(12), 1996, pp. 8944-8950
Authors:
DANIAU W
BALLANDRAS S
KUBAT L
HARDIN J
MARTIN G
BASROUR S
Citation: W. Daniau et al., FABRICATION OF AN ELECTROSTATIC WOBBLE MICROMOTOR USING DEEP-ETCH UV LITHOGRAPHY, NICKEL ELECTROFORMING AND A TITANIUM SACRIFICIAL LAYER, Journal of micromechanics and microengineering, 5(4), 1995, pp. 270-275
Authors:
BALLANDRAS S
DANIAU W
BASROUR S
ROBERT L
ROUILLAY M
BLIND P
BERNEDE P
ROBERT D
ROCHER S
HAUDEN D
MEGTERT S
LABEQUE A
ZEWEN L
DEXPERT H
COMES R
ROUSSEAUX F
RAVERT MF
LAUNOIS H
Citation: S. Ballandras et al., DEEP-ETCH X-RAY-LITHOGRAPHY USING SILICON-GOLD MASKS FABRICATED BY DEEP-ETCH UV LITHOGRAPHY AND ELECTROFORMING, Journal of micromechanics and microengineering, 5(3), 1995, pp. 203-208