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Results: 1-25 | 26-50 | 51-75 | 76-78
Results: 1-25/78
PATTERNED THICK PHOTORESIST LAYERS FOR PROTECTION OF PROTRUDING STRUCTURES DURING WET AND DRY-ETCHING PROCESSES
Authors: INDERMUHLE PF ROTH S DELLMANN L DEROOIJ NF
Citation: Pf. Indermuhle et al., PATTERNED THICK PHOTORESIST LAYERS FOR PROTECTION OF PROTRUDING STRUCTURES DURING WET AND DRY-ETCHING PROCESSES, Journal of micromechanics and microengineering, 8(2), 1998, pp. 74-76
SURFACE-MICROMACHINED TA-SI-N BEAMS FOR USE IN MICROMECHANICS
Authors: GRETILLAT MA LINDER C DOMMANN A STAUFERT G DEROOIJ NF NICOLET MA
Citation: Ma. Gretillat et al., SURFACE-MICROMACHINED TA-SI-N BEAMS FOR USE IN MICROMECHANICS, Journal of micromechanics and microengineering, 8(2), 1998, pp. 88-90
CVD DIAMOND PROBES FOR NANOTECHNOLOGY
Authors: NIEDERMANN P HANNI W MOREL D PERRET A SKINNER N INDERMUHLE PF DEROOIJ NF BUFFAT PA
Citation: P. Niedermann et al., CVD DIAMOND PROBES FOR NANOTECHNOLOGY, Applied physics A: Materials science & processing, 66, 1998, pp. 31-34
2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS
Authors: DELLMANN L ROTH S BEURET C PARATTE L RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF
Citation: L. Dellmann et al., 2 STEPS MICROMOULDING AND PHOTOPOLYMER HIGH-ASPECT-RATIO STRUCTURING FOR APPLICATIONS IN PIEZOELECTRIC MOTOR COMPONENTS, Microsystem technologies, 4(3), 1998, pp. 147-150
FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS
Authors: DELLMANN L ROTH S BEURET C RACINE GA LORENZ H DESPONT M RENAUD P VETTIGER P DEROOIJ NF
Citation: L. Dellmann et al., FABRICATION PROCESS OF HIGH-ASPECT-RATIO ELASTIC AND SU-8 STRUCTURES FOR PIEZOELECTRIC MOTOR APPLICATIONS, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 42-47
LOW-CAST PDMS SEAL RING FOR SINGLE-SIDE WET ETCHING OF MEMS STRUCTURES
Authors: BRUGGER J BELJAKOVIC G DESPONT M BIEBUYCK H DEROOIJ NF VETTIGER P
Citation: J. Brugger et al., LOW-CAST PDMS SEAL RING FOR SINGLE-SIDE WET ETCHING OF MEMS STRUCTURES, Sensors and actuators. A, Physical, 70(1-2), 1998, pp. 191-194
CHARACTERIZATION OF AN INTEGRATED FORCE SENSOR-BASED ON A MOS-TRANSISTOR FOR APPLICATIONS IN SCANNING FORCE MICROSCOPY
Authors: AKIYAMA T TONIN A HIDBER HR BRUGGER J VETTIGER P STAUFER U DEROOIJ NF
Citation: T. Akiyama et al., CHARACTERIZATION OF AN INTEGRATED FORCE SENSOR-BASED ON A MOS-TRANSISTOR FOR APPLICATIONS IN SCANNING FORCE MICROSCOPY, Sensors and actuators. A, Physical, 64(1), 1998, pp. 1-6
ULTRASONIC FLEXURAL LAMB-WAVE ACTUATORS BASED ON PZT THIN-FILM
Authors: LUGINBUHL P COLLINS SD RACINE GA GRETILLAT MA DEROOIJ NF BROOKS KG SETTER N
Citation: P. Luginbuhl et al., ULTRASONIC FLEXURAL LAMB-WAVE ACTUATORS BASED ON PZT THIN-FILM, Sensors and actuators. A, Physical, 64(1), 1998, pp. 41-49
FABRICATION OF METALLIC PROBES BY A NEW TECHNOLOGY-BASED ON DOUBLE MOLDING
Authors: BEURET C NIEDERMANN P STAUFER U DEROOIJ NF
Citation: C. Beuret et al., FABRICATION OF METALLIC PROBES BY A NEW TECHNOLOGY-BASED ON DOUBLE MOLDING, Microelectronic engineering, 42, 1998, pp. 543-546
ELECTROLYTIC THIN-LAYER SCANNING TUNNELING MICROSCOPE - FABRICATION AND FIRST RESULTS
Authors: INDERMUHLE PF AMMANN E HARING P KOTZ R SIEGENTHALER H DEROOIJ NF
Citation: Pf. Indermuhle et al., ELECTROLYTIC THIN-LAYER SCANNING TUNNELING MICROSCOPE - FABRICATION AND FIRST RESULTS, Microelectronic engineering, 42, 1998, pp. 547-550
GEL-INTEGRATED MICROELECTRODE ARRAYS FOR DIRECT VOLTAMMETRIC MEASUREMENTS OF HEAVY-METALS IN NATURAL-WATERS AND OTHER COMPLEX MEDIA
Authors: BELMONTHEBERT C TERCIER ML BUFFLE J FIACCABRINO GC DEROOIJ NF KOUDELKAHEP M
Citation: C. Belmonthebert et al., GEL-INTEGRATED MICROELECTRODE ARRAYS FOR DIRECT VOLTAMMETRIC MEASUREMENTS OF HEAVY-METALS IN NATURAL-WATERS AND OTHER COMPLEX MEDIA, Analytical chemistry (Washington), 70(14), 1998, pp. 2949-2956
UNIVERSAL COULOMETRIC NANOTITRATORS WITH POTENTIOMETRIC DETECTION
Authors: GUENAT OT MORF WE VANDERSCHOOT BH DEROOIJ NF
Citation: Ot. Guenat et al., UNIVERSAL COULOMETRIC NANOTITRATORS WITH POTENTIOMETRIC DETECTION, Analytica chimica acta, 361(3), 1998, pp. 261-272
ON-CHIP GENERATION AND DETECTION OF ELECTROCHEMILUMINESCENCE
Authors: FIACCABRINO GC DEROOIJ NF KOUDELKAHEP M
Citation: Gc. Fiaccabrino et al., ON-CHIP GENERATION AND DETECTION OF ELECTROCHEMILUMINESCENCE, Analytica chimica acta, 359(3), 1998, pp. 263-267
HOLOGRAPHIC REFRACTIVE-INDEX DETECTOR FOR APPLICATION IN MICROCHIP-BASED SEPARATION SYSTEMS
Authors: BURGGRAF N KRATTIGER B DEMELLO AJ DEROOIJ NF MANZ A
Citation: N. Burggraf et al., HOLOGRAPHIC REFRACTIVE-INDEX DETECTOR FOR APPLICATION IN MICROCHIP-BASED SEPARATION SYSTEMS, Analyst (London. 1877. Print), 123(7), 1998, pp. 1443-1447
A 1.5-V-SUPPLIED CMOS ASIC FOR THE ACTUATION OF AN ELECTROSTATIC MICROMOTOR
Authors: FAVRAT P PARATTE L BALLAN H DECLERCQ MJ DEROOIJ NF
Citation: P. Favrat et al., A 1.5-V-SUPPLIED CMOS ASIC FOR THE ACTUATION OF AN ELECTROSTATIC MICROMOTOR, IEEE-ASME TRANSACTIONS ON MECHATRONICS, 2(3), 1997, pp. 153-160
MICROFABRICATED LAMB WAVE DEVICE BASED ON PZT SOL-GEL THIN-FILM FOR MECHANICAL TRANSPORT OF SOLID PARTICLES AND LIQUIDS
Authors: LUGINBUHL P COLLINS SD RACINE GA GRETILLAT MA DEROOIJ NF BROOKS KG SETTER N
Citation: P. Luginbuhl et al., MICROFABRICATED LAMB WAVE DEVICE BASED ON PZT SOL-GEL THIN-FILM FOR MECHANICAL TRANSPORT OF SOLID PARTICLES AND LIQUIDS, Journal of microelectromechanical systems, 6(4), 1997, pp. 337-346
VERTICAL MIRRORS FABRICATED BY DEEP REACTIVE ION ETCHING FOR FIBEROPTIC SWITCHING APPLICATIONS
Authors: MARXER C THIO C GRETILLAT MA DEROOIJ NF BATTIG R ANTHAMATTEN O VALK B VOGEL P
Citation: C. Marxer et al., VERTICAL MIRRORS FABRICATED BY DEEP REACTIVE ION ETCHING FOR FIBEROPTIC SWITCHING APPLICATIONS, Journal of microelectromechanical systems, 6(3), 1997, pp. 277-285
POTENTIOMETRIC RESPONSE BEHAVIOR OF PARALLEL ARRAYS OF CATION-SELECTIVE AND ANION-SELECTIVE MEMBRANE ELECTRODES AS REFERENCE DEVICES
Authors: MORF WE DEROOIJ NF
Citation: We. Morf et Nf. Derooij, POTENTIOMETRIC RESPONSE BEHAVIOR OF PARALLEL ARRAYS OF CATION-SELECTIVE AND ANION-SELECTIVE MEMBRANE ELECTRODES AS REFERENCE DEVICES, Electroanalysis, 9(12), 1997, pp. 903-907
ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED TIPS AND PIEZOELECTRIC LAYERS FOR ACTUATION AND DETECTION
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED TIPS AND PIEZOELECTRIC LAYERS FOR ACTUATION AND DETECTION, Journal of micromechanics and microengineering, 7(3), 1997, pp. 218-220
PERFORMANCE OF AMPEROMETRIC SENSORS BASED ON MULTIPLE MICROELECTRODE ARRAYS
Authors: MORF WE DEROOIJ NF
Citation: We. Morf et Nf. Derooij, PERFORMANCE OF AMPEROMETRIC SENSORS BASED ON MULTIPLE MICROELECTRODE ARRAYS, Sensors and actuators. B, Chemical, 44(1-3), 1997, pp. 538-541
RELIABILITY CONSIDERATIONS FOR ELECTROSTATIC POLYSILICON ACTUATORS USING AS AN EXAMPLE THE REMO COMPONENT
Authors: MARXER C GRETILLAT MA DEROOIJ NF BATTIG R ANTHAMATTEN O VALK B VOGEL P
Citation: C. Marxer et al., RELIABILITY CONSIDERATIONS FOR ELECTROSTATIC POLYSILICON ACTUATORS USING AS AN EXAMPLE THE REMO COMPONENT, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 449-454
FABRICATION AND CHARACTERIZATION OF CANTILEVERS WITH INTEGRATED SHARPTIPS AND PIEZOELECTRIC ELEMENTS FOR ACTUATION AND DETECTION FOR PARALLEL AFM APPLICATIONS
Authors: INDERMUHLE PF SCHURMANN G RACINE GA DEROOIJ NF
Citation: Pf. Indermuhle et al., FABRICATION AND CHARACTERIZATION OF CANTILEVERS WITH INTEGRATED SHARPTIPS AND PIEZOELECTRIC ELEMENTS FOR ACTUATION AND DETECTION FOR PARALLEL AFM APPLICATIONS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 186-190
A NEW FABRICATION METHOD FOR BOROSILICATE GLASS-CAPILLARY TUBES WITH LATERAL INLETS AND OUTLETS
Authors: GRETILLAT MA PAOLETTI F THIEBAUD P ROTH S KOUDELKAHEP M DEROOIJ NF
Citation: Ma. Gretillat et al., A NEW FABRICATION METHOD FOR BOROSILICATE GLASS-CAPILLARY TUBES WITH LATERAL INLETS AND OUTLETS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 219-222
SIMULTANEOUS MULTIELECTRODE RECORDING OF FIELD POTENTIAL AND EXTRACELLULAR MEDIUM MONITORING IN BRAIN SLICE CULTURES
Authors: THIEBAUD P DEROOIJ NF ROBERT F CORREGES P DUPORT S STOPPINI L
Citation: P. Thiebaud et al., SIMULTANEOUS MULTIELECTRODE RECORDING OF FIELD POTENTIAL AND EXTRACELLULAR MEDIUM MONITORING IN BRAIN SLICE CULTURES, European journal of cell biology, 74, 1997, pp. 162-162
SILICON MICRO NANOMECHANICAL DEVICE FABRICATION BASED ON FOCUSED ION-BEAM SURFACE MODIFICATION AND KOH ETCHING/
Authors: BRUGGER J BELJAKOVIC G DESPONT M DEROOIJ NF VETTIGER P
Citation: J. Brugger et al., SILICON MICRO NANOMECHANICAL DEVICE FABRICATION BASED ON FOCUSED ION-BEAM SURFACE MODIFICATION AND KOH ETCHING/, Microelectronic engineering, 35(1-4), 1997, pp. 401-404
Risultati: 1-25 | 26-50 | 51-75 | 76-78