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Dahint, R
Herrwerth, S
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Eck, W
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Authors:
Eck, W
Stadler, V
Geyer, W
Zharnikov, M
Golzhauser, A
Grunze, M
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Authors:
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Stadler, V
Eck, W
Zharnikov, M
Golzhauser, A
Grunze, M
Citation: W. Geyer et al., Electron-induced crosslinking of aromatic self-assembled monolayers: Negative resists for nanolithography, APPL PHYS L, 75(16), 1999, pp. 2401-2403