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Results:
1-22
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Results: 22
Authors:
Fedosenko, G
Korzec, D
Schwabedissen, A
Engemann, J
Braca, E
Kenny, JM
Citation: G. Fedosenko et al., Comparison of diamond-like carbon films synthesized by 2.45 GHz microwave and 13.56 MHz multi-jet radiofrequency plasma sources, DIAM RELAT, 10(3-7), 2001, pp. 920-926
Authors:
Nakamura, M
Aoki, T
Hatanaka, Y
Korzec, D
Engemann, J
Citation: M. Nakamura et al., Comparison of hydrophilic properties of amorphous TiOx films obtained by radio frequency sputtering and plasma-enhanced chemical vapor deposition, J MATER RES, 16(2), 2001, pp. 621-626
Authors:
Geisler, S
Brockhaus, A
Engemann, J
Citation: S. Geisler et al., Characteristics of a large diameter reactive ion beam generated by an electron cyclotron resonance microwave plasma source, J VAC SCI A, 19(2), 2001, pp. 539-546
Authors:
Korzec, D
Nithammer, D
Engemann, J
Ikeda, T
Aoki, T
Hatanaka, Y
Citation: D. Korzec et al., Radio frequency hollow cathode jet: optical emission study, SURF COAT, 142, 2001, pp. 21-27
Authors:
Aumann, T
Theirich, D
Engemann, J
Citation: T. Aumann et al., Rapid surface modification of polyethylene in microwave and r.f.-plasmas: comparative study, SURF COAT, 142, 2001, pp. 169-174
Authors:
Fedosenko, G
Schwabedissen, A
Korzec, D
Engemann, J
Citation: G. Fedosenko et al., Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases, SURF COAT, 142, 2001, pp. 693-697
Authors:
Nakamura, M
Korzec, D
Aoki, T
Engemann, J
Hatanaka, Y
Citation: M. Nakamura et al., Characterization of TiOx film prepared by plasma enhanced chemical vapor deposition using a multi-jet hollow cathode plasma source, APPL SURF S, 175, 2001, pp. 697-702
Authors:
Schwabedissen, A
Brockhaus, A
Georg, A
Engemann, J
Citation: A. Schwabedissen et al., Determination of the gas-phase Si atom density in radio frequency discharges by means of cavity ring-down spectroscopy, J PHYS D, 34(7), 2001, pp. 1116-1121
Authors:
Behle, S
Brockhaus, A
Engemann, J
Citation: S. Behle et al., Time-resolved investigations of pulsed microwave excited plasmas, PLASMA SOUR, 9(1), 2000, pp. 57-67
Authors:
Brockhaus, A
Georg, A
Wingsch, V
Engemann, J
Citation: A. Brockhaus et al., Plasma erosion of a magnesium radio-frequency cathode measured by laser-induced fluorescence, J VAC SCI A, 18(3), 2000, pp. 927-932
Authors:
Fedosenko, G
Engemann, J
Korzec, D
Citation: G. Fedosenko et al., Deposition of diamond-like carbon films by a hollow cathode multi-jet rf plasma system, SURF COAT, 133, 2000, pp. 535-539
Authors:
Korzec, D
Fedosenko, G
Georg, A
Engemann, J
Citation: D. Korzec et al., Hybrid plasma system for diamond-like carbon film deposition, SURF COAT, 131(1-3), 2000, pp. 20-25
Authors:
Korzec, D
Muller, A
Engemann, J
Citation: D. Korzec et al., Microwave plasma source for high current ion beam neutralization, REV SCI INS, 71(2), 2000, pp. 800-803
Authors:
Korzec, D
Dahlhaus, R
Engemann, J
Citation: D. Korzec et al., Bipolar extraction neutralization: Time resolved characterization, REV SCI INS, 71(2), 2000, pp. 1090-1093
Authors:
Gohl, A
Habermann, T
Nau, D
Muller, G
Raiko, V
Theirich, D
Engemann, J
Citation: A. Gohl et al., Local field emission features of thick diamond films on various silicon substrates, J VAC SCI B, 17(2), 1999, pp. 696-699
Authors:
Schwabedissen, A
Soll, C
Brockhaus, A
Engemann, J
Citation: A. Schwabedissen et al., Electron density measurements in a slot antenna microwave plasma source bymeans of the plasma oscillation method, PLASMA SOUR, 8(3), 1999, pp. 440-447
Authors:
Brockhaus, A
Behle, S
Georg, A
Schwabedissen, A
Soll, C
Engemann, J
Citation: A. Brockhaus et al., Diagnostics of a chemically active, pulsed microwave plasma for depositionof quartz-like films, CONTR PLASM, 39(5), 1999, pp. 399-409
Authors:
Engemann, J
Walter, M
Citation: J. Engemann et M. Walter, Modelling of microwave plasma sources: potential and applications, PLASMA PHYS, 41, 1999, pp. B259-B272
Authors:
Muller, A
Emme, M
Korzec, D
Engemann, J
Citation: A. Muller et al., Direct power coupling into a waveguide cavity plasma source, SURF COAT, 119, 1999, pp. 674-678
Authors:
Osenberg, F
Theirich, D
Decker, A
Engemann, J
Citation: F. Osenberg et al., Process control of a plasma treatment of wool by plasma diagnostics, SURF COAT, 119, 1999, pp. 808-811
Authors:
Mildner, M
Korzec, D
Engemann, J
Citation: M. Mildner et al., 13.56 MHz hollow cathode jet matrix plasma source for large area surface coating, SURF COAT, 112(1-3), 1999, pp. 366-372
Authors:
Brockhaus, A
Behle, S
Georg, A
Engemann, J
Citation: A. Brockhaus et al., Ignition phase of a pulsed microwave-excited oxygen plasma, J PHYS IV, 8(P7), 1998, pp. 297-306
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