Authors: SMIRNOV AS USTAVSHCHIKOV AY FROLOV KS

Citation: As. Smirnov et al., SETUP FOR TIME-RESOLVED MEASUREMENTS OF THE ENERGY-DISTRIBUTION OF CHARGED-PARTICLES BOMBARDING ELECTRODE IN RF DISCHARGE, Instruments and experimental techniques, 39(2), 1996, pp. 242-247

Authors: SMIRNOV AS USTAVSHCHIKOV AY FROLOV KS

Citation: As. Smirnov et al., ENERGY-DISTRIBUTION OF ELECTRONS AND IONS BOMBARDING ELECTRODES IN HIGH-FREQUENCY DISCHARGES, Zurnal tehniceskoj fiziki, 65(8), 1995, pp. 38-50

Authors: SMIRNOV AS USTAVSHCHIKOV AY FROLOV KS

Citation: As. Smirnov et al., DETERMINATION OF ELECTRON-CONCENTRATION IN AN RF DISCHARGE USING A FABRI-PEROT CAVITY, Instruments and experimental techniques, 37(3), 1994, pp. 342-344

Authors: DULKIN AE MOSHKALEV SA SMIRNOV AS FROLOV KS

Citation: Ae. Dulkin et al., STUDY OF HIGH-FREQUENCY CAPACITY LOW-PRES SURE DISCHARGE, Zurnal tehniceskoj fiziki, 63(7), 1993, pp. 64-73

Authors: DULKIN AE PYATAEV VZ SOKOLOVA NO MOSHKALYOV SA SMIRNOV AS FROLOV KS

Citation: Ae. Dulkin et al., THE STUDY OF GAAS REACTIVE ION ETCHING IN CL2 AR/, Vacuum, 44(9), 1993, pp. 913-917