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Results:
1-17
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Results: 17
Authors:
Kleinsorge, B
Rodil, SE
Adamopoulos, G
Robertson, J
Grambole, D
Fukarek, W
Citation: B. Kleinsorge et al., Hydrogen and disorder in diamond-like carbon, DIAM RELAT, 10(3-7), 2001, pp. 965-969
Authors:
Chevolleau, T
Fukarek, W
Moller, W
Citation: T. Chevolleau et al., Ion energy distribution in a radiofrequency C4F8 discharge, CONTR PLASM, 41(4), 2001, pp. 387-392
Authors:
Fukarek, W
Citation: W. Fukarek, In situ characterization of thin film growth: Boron nitride on silicon, J VAC SCI A, 19(4), 2001, pp. 2017-2024
Authors:
Fukarek, W
Fitz, C
Citation: W. Fukarek et C. Fitz, In-situ stress diagnostics, SURF COAT, 142, 2001, pp. 868-873
Authors:
van Dillen, T
Snoeks, E
Fukarek, W
van Kats, CM
Velikov, KP
van Blaaderen, A
Polman, A
Citation: T. Van Dillen et al., Anisotropic deformation of colloidal particles under MeV ion irradiation, NUCL INST B, 175, 2001, pp. 350-356
Authors:
Fitz, C
Kolitsch, A
Fukarek, W
Citation: C. Fitz et al., Stress relaxation during annealing of boron nitride films, THIN SOL FI, 389(1-2), 2001, pp. 173-179
Authors:
van Dillen, T
Polman, A
Fukarek, W
van Blaaderen, A
Citation: T. Van Dillen et al., Energy-dependent anisotropic deformation of colloidal silica particles under MeV Au irradiation, APPL PHYS L, 78(7), 2001, pp. 910-912
Authors:
Chevolleau, T
Fukarek, W
Citation: T. Chevolleau et W. Fukarek, Ion flux, ion energy distribution and neutral density in an inductively coupled argon discharge, PLASMA SOUR, 9(4), 2000, pp. 568-573
Authors:
Wang, X
Mao, DS
Li, W
Liu, XH
Kolitsch, A
Mueklich, A
Manova, D
Fukarek, W
Moeller, W
Citation: X. Wang et al., Interface engineering for covalently bonded disordered thin films: boron nitride and diamond-like carbon, SURF COAT, 131(1-3), 2000, pp. 514-519
Authors:
Fitz, C
Fukarek, W
Kolitsch, A
Moller, W
Citation: C. Fitz et al., Investigation on stress evolution in boron nitride films, SURF COAT, 128, 2000, pp. 292-297
Authors:
Fitz, C
Fukarek, W
Kolitsch, A
Moller, W
Citation: C. Fitz et al., An instrument for in-situ stress measurement in thin films during growth, SURF COAT, 128, 2000, pp. 474-478
Authors:
Pezoldt, J
Yankov, RA
Werninghaus, T
Zahn, DRT
Fukarek, W
Teichert, G
Luebbe, M
Skorupa, W
Citation: J. Pezoldt et al., Structural and compositional characterization of 6H-SiC implanted with N+ and Al+ ions using optical methods, DIAM RELAT, 8(2-5), 1999, pp. 346-351
Authors:
Kolitsch, A
Wang, X
Manova, D
Fukarek, W
Moller, W
Oswald, S
Citation: A. Kolitsch et al., Effects of titanium and aluminum incorporations on the structure of boron nitride thin films, DIAM RELAT, 8(2-5), 1999, pp. 386-390
Authors:
Pezoldt, J
Yankov, RA
Mucklich, A
Fukarek, W
Voelskow, M
Reuther, H
Skorupa, W
Citation: J. Pezoldt et al., A novel (SiC)(1-x)(AlN)(x) compound synthesized using ion beams, NUCL INST B, 147(1-4), 1999, pp. 273-278
Authors:
Rybin, PV
Kulikov, DV
Trushin, YV
Yankov, RA
Ecke, G
Fukarek, W
Skorupa, W
Pezoldt, J
Citation: Pv. Rybin et al., Modelling high-temperature co-implantation of N+ and Al+ ions in silicon carbide: the effect of stress on the implant and damage distributions, NUCL INST B, 147(1-4), 1999, pp. 279-285
Authors:
Biederman, H
Stundzia, V
Slavinska, D
Zalman, J
Pesicka, J
Vanecek, M
Zemek, J
Fukarek, W
Citation: H. Biederman et al., Composite germanium/C : H films prepared by DC unbalanced magnetron sputtering, THIN SOL FI, 351(1-2), 1999, pp. 151-157
Authors:
Fukarek, W
Kaschny, JR
Citation: W. Fukarek et Jr. Kaschny, Cavities in helium implanted and annealed silicon characterized by spectroscopic ellipsometry, J APPL PHYS, 86(8), 1999, pp. 4160-4165
Risultati:
1-17
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