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Results: 1-9 |
Results: 9
SURFACE-MICROMACHINED TA-SI-N BEAMS FOR USE IN MICROMECHANICS
Authors: GRETILLAT MA LINDER C DOMMANN A STAUFERT G DEROOIJ NF NICOLET MA
Citation: Ma. Gretillat et al., SURFACE-MICROMACHINED TA-SI-N BEAMS FOR USE IN MICROMECHANICS, Journal of micromechanics and microengineering, 8(2), 1998, pp. 88-90
ULTRASONIC FLEXURAL LAMB-WAVE ACTUATORS BASED ON PZT THIN-FILM
Authors: LUGINBUHL P COLLINS SD RACINE GA GRETILLAT MA DEROOIJ NF BROOKS KG SETTER N
Citation: P. Luginbuhl et al., ULTRASONIC FLEXURAL LAMB-WAVE ACTUATORS BASED ON PZT THIN-FILM, Sensors and actuators. A, Physical, 64(1), 1998, pp. 41-49
MICROFABRICATED LAMB WAVE DEVICE BASED ON PZT SOL-GEL THIN-FILM FOR MECHANICAL TRANSPORT OF SOLID PARTICLES AND LIQUIDS
Authors: LUGINBUHL P COLLINS SD RACINE GA GRETILLAT MA DEROOIJ NF BROOKS KG SETTER N
Citation: P. Luginbuhl et al., MICROFABRICATED LAMB WAVE DEVICE BASED ON PZT SOL-GEL THIN-FILM FOR MECHANICAL TRANSPORT OF SOLID PARTICLES AND LIQUIDS, Journal of microelectromechanical systems, 6(4), 1997, pp. 337-346
VERTICAL MIRRORS FABRICATED BY DEEP REACTIVE ION ETCHING FOR FIBEROPTIC SWITCHING APPLICATIONS
Authors: MARXER C THIO C GRETILLAT MA DEROOIJ NF BATTIG R ANTHAMATTEN O VALK B VOGEL P
Citation: C. Marxer et al., VERTICAL MIRRORS FABRICATED BY DEEP REACTIVE ION ETCHING FOR FIBEROPTIC SWITCHING APPLICATIONS, Journal of microelectromechanical systems, 6(3), 1997, pp. 277-285
RELIABILITY CONSIDERATIONS FOR ELECTROSTATIC POLYSILICON ACTUATORS USING AS AN EXAMPLE THE REMO COMPONENT
Authors: MARXER C GRETILLAT MA DEROOIJ NF BATTIG R ANTHAMATTEN O VALK B VOGEL P
Citation: C. Marxer et al., RELIABILITY CONSIDERATIONS FOR ELECTROSTATIC POLYSILICON ACTUATORS USING AS AN EXAMPLE THE REMO COMPONENT, Sensors and actuators. A, Physical, 61(1-3), 1997, pp. 449-454
A NEW FABRICATION METHOD FOR BOROSILICATE GLASS-CAPILLARY TUBES WITH LATERAL INLETS AND OUTLETS
Authors: GRETILLAT MA PAOLETTI F THIEBAUD P ROTH S KOUDELKAHEP M DEROOIJ NF
Citation: Ma. Gretillat et al., A NEW FABRICATION METHOD FOR BOROSILICATE GLASS-CAPILLARY TUBES WITH LATERAL INLETS AND OUTLETS, Sensors and actuators. A, Physical, 60(1-3), 1997, pp. 219-222
MEGAHERTZ OPTOMECHANICAL MODULATOR
Authors: MARXER C GRETILLAT MA JAECKLIN VP BAETTIG R ANTHAMATTEN O VOGEL P
Citation: C. Marxer et al., MEGAHERTZ OPTOMECHANICAL MODULATOR, Sensors and actuators. A, Physical, 52(1-3), 1996, pp. 46-50
INTEGRATED-CIRCUIT COMPATIBLE ELECTROSTATIC POLYSILICON MICRORELAYS
Authors: GRETILLAT MA THIEBAUD P LINDER C DEROOIJ NF
Citation: Ma. Gretillat et al., INTEGRATED-CIRCUIT COMPATIBLE ELECTROSTATIC POLYSILICON MICRORELAYS, Journal of micromechanics and microengineering, 5(2), 1995, pp. 156-160
INTEGRATED SHIELDING LINES ON MULTILAYER POLYSILICON RESONATORS
Authors: GRETILLAT MA LINDER C DEROOIJ NF
Citation: Ma. Gretillat et al., INTEGRATED SHIELDING LINES ON MULTILAYER POLYSILICON RESONATORS, Sensors and actuators. A, Physical, 43(1-3), 1994, pp. 351-356
Risultati: 1-9 |