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FARROW RC
POSTEK MT
KEERY WJ
JONES SN
LOWNEY JR
BLAKEY M
FETTER LA
GRIFFITH JE
LIDDLE JA
HOPKINS LC
HUGGINS HA
PEABODY M
NOVEMBRE A
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Authors:
GRIFFITH JE
HOPKINS LC
BRYSON CE
BERGHAUS A
SNYDER EJ
PLOMBON JJ
VASILYEV LA
HECHT M
BINDELL JB
Citation: Je. Griffith et al., WALL ANGLE MEASUREMENT WITH A SCANNING PROBE MICROSCOPE EMPLOYING A ONE-DIMENSIONAL FORCE SENSOR, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2189-2192
Authors:
GRIFFITH JE
MARCHMAN HM
MILLER GL
HOPKINS LC
Citation: Je. Griffith et al., DIMENSIONAL METROLOGY WITH SCANNING PROBE MICROSCOPES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(3), 1995, pp. 1100-1105
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Authors:
HOPKINS LC
GRIFFITH JE
HARRIOTT LR
VASILE MJ
Citation: Lc. Hopkins et al., POLYCRYSTALLINE TUNGSTEN AND IRIDIUM PROBE TIP PREPARATION WITH A GA-BEAM( FOCUSED ION), Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(2), 1995, pp. 335-337
Citation: Je. Griffith et al., EDGE POSITION MEASUREMENT WITH A SCANNING PROBE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3567-3570
Citation: Hm. Marchman et al., NANOMETER-SCALE DIMENSIONAL METROLOGY FOR ADVANCED LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3585-3590
Authors:
WOOD OR
BJORKHOLM JE
FETTER L
HIMEL MD
TENNANT DM
MACDOWELL AA
LAFONTAINE B
GRIFFITH JE
TAYLOR GN
WASKIEWICZ WK
WINDT DL
KORTRIGHT JB
GULLIKSON EK
NGUYEN K
Citation: Or. Wood et al., WAVELENGTH DEPENDENCE OF THE RESIST SIDEWALL ANGLE IN EXTREME-ULTRAVIOLET LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3841-3845
Citation: Hm. Marchman et al., FABRICATION OF OPTICAL-FIBER PROBES FOR NANOMETER-SCALE DIMENSIONAL METROLOGY, Review of scientific instruments, 65(8), 1994, pp. 2538-2541
Authors:
GRIFFITH JE
MARCHMAN HM
MILLER GL
HOPKINS LC
VASILE MJ
SCHWALM SA
Citation: Je. Griffith et al., LINE-PROFILE MEASUREMENT WITH A SCANNING PROBE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2473-2476
Citation: Je. Griffith et Da. Grigg, DIMENSIONAL METROLOGY WITH SCANNING PROBE MICROSCOPES, Journal of applied physics, 74(9), 1993, pp. 180000083-180000109
Authors:
RIEVES RD
BASS D
CARTER RR
GRIFFITH JE
NORMAN JR
Citation: Rd. Rieves et al., SEVERE COPD AND ACUTE RESPIRATORY-FAILURE - CORRELATES FOR SURVIVAL AT THE TIME OF TRACHEAL INTUBATION, Chest, 104(3), 1993, pp. 854-860