Authors:
Abedinov, N
Grabiec, P
Gotszalk, T
Ivanov, T
Voigt, J
Rangelow, IW
Citation: N. Abedinov et al., Micromachined piezoresistive cantilever array with integrated resistive microheater for calorimetry and mass detection, J VAC SCI A, 19(6), 2001, pp. 2884-2888
Authors:
Degen, A
Abedinov, N
Gotszalk, T
Sossna, E
Kratzenberg, M
Rangelow, IW
Citation: A. Degen et al., Stress analysis in Si membranes for open stencil masks and mini-reticles using double bulging and resonance methods, MICROEL ENG, 57-8, 2001, pp. 425-432
Authors:
Barth, W
Debski, T
Abedinov, N
Ivanov, T
Heerlein, H
Volland, B
Gotszalk, T
Rangelow, IW
Torkar, K
Fritzenwallner, K
Grabiec, P
Studzinska, K
Kostic, I
Hudek, P
Citation: W. Barth et al., Evaluation and fabrication of AFM array for ESA-Midas /Rosetta space mission, MICROEL ENG, 57-8, 2001, pp. 825-831
Authors:
Grabiec, PB
Sunyk, R
Shi, F
Popovic, G
Gotszalk, T
Hudek, P
Dumania, P
Rangelow, IW
Citation: Pb. Grabiec et al., A design and fabrication of a 3D force sensitive microprobe for surface characterization., MICROEL ENG, 46(1-4), 1999, pp. 405-408
Authors:
Gotszalk, T
Radojewski, J
Grabiec, PB
Dumania, P
Shi, F
Hudek, P
Rangelow, IW
Citation: T. Gotszalk et al., Fabrication of multipurpose piezoresistive Wheatstone bridge cantilevers with conductive microtips for electrostatic and scanning capacitance microscopy, J VAC SCI B, 16(6), 1998, pp. 3948-3953