Authors:
Gwo, S
Wu, CL
Chien, FSS
Yasuda, T
Yamasaki, S
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Citation: Fss. Chien et al., Nano-oxidation of silicon nitride films with an atomic force microscope: Chemical mapping, kinetics, and applications, J APPL PHYS, 89(4), 2001, pp. 2465-2472
Authors:
Klauser, R
Hong, IH
Su, HJ
Chen, TT
Gwo, S
Wang, SC
Chuang, TJ
Gritsenko, VA
Citation: R. Klauser et al., Oxidation states in scanning-probe-induced Si3N4 to SiOx conversion studied by scanning photoemission microscopy, APPL PHYS L, 79(19), 2001, pp. 3143-3145
Citation: T. Yasuda et al., Nanoscale selective-area epitaxial growth of Si using an ultrathin SiO2/Si3Ni4 mask patterned by an atomic force microscope, APPL PHYS L, 77(24), 2000, pp. 3917-3919
Citation: Fss. Chien et al., Nanomachining of (110)-oriented silicon by scanning probe lithography and anisotropic wet etching, APPL PHYS L, 75(16), 1999, pp. 2429-2431