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Results:
1-7
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Results: 7
Authors:
STAUCH H
SIMON K
SCHEUNEMANN HU
HUBER HL
Citation: H. Stauch et al., IMPACT OF CHUCK FLATNESS ON WAFER DISTORTION AND STEPPER OVERLAY - COMPARISON OF EXPERIMENTAL AND FEM-RESULTS, Microelectronic engineering, 23(1-4), 1994, pp. 197-201
Authors:
PANTENBURG FJ
CHLEBEK J
ELKHOLI A
HUBER HL
MOHR J
OERTEL HK
SCHULZ J
Citation: Fj. Pantenburg et al., ADHESION PROBLEMS IN DEEP-ETCH X-RAY-LITHOGRAPHY CAUSED BY FLUORESCENCE RADIATION FROM THE PLATING BASE, Microelectronic engineering, 23(1-4), 1994, pp. 223-226
Authors:
CHLEBEK J
HUBER HL
OERTEL HK
REIMER K
Citation: J. Chlebek et al., NANOSTRUCTURE PATTERNING WITH SOR X-RAY-LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 227-230
Authors:
LOCHEL B
MACIOSSEK A
KONIG M
QUENZER HJ
HUBER HL
Citation: B. Lochel et al., GALVANOPLATED 3D STRUCTURES FOR MICRO SYSTEMS, Microelectronic engineering, 23(1-4), 1994, pp. 455-459
Authors:
TRUBE J
HUBER HL
BLASINGBANGERT C
RINN K
ROTH KD
Citation: J. Trube et al., HIGH-PERFORMANCE PATTERN PLACEMENT METROLOGY ON DYNAMIC RANDOM-ACCESSMEMORY LAYERS OF 0.25 MU-M TECHNOLOGY, JPN J A P 1, 32(12B), 1993, pp. 6274-6276
Authors:
SCHAFER L
BLUHM A
KLAGES CP
LOCHEL B
BUCHMANN LM
HUBER HL
Citation: L. Schafer et al., DIAMOND MEMBRANES WITH CONTROLLED STRESS FOR SUBMICRON LITHOGRAPHY, DIAMOND AND RELATED MATERIALS, 2(8), 1993, pp. 1191-1196
Authors:
LOCHEL B
MACIOSSEK A
KONIG M
HUBER HL
BAUER G
Citation: B. Lochel et al., FABRICATION OF MAGNETIC MICROSTRUCTURES BY USING THICK LAYER RESISTS, Microelectronic engineering, 21(1-4), 1993, pp. 463-466
Risultati:
1-7
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