Authors: Suu, K Tani, N Chu, F Hickert, G Hadnagy, TD Davenport, T

Citation: K. Suu et al., Process stability of ferroelectric PLZT thin film sputtering for FRAM (R) production, INTEGR FERR, 26(1-4), 1999, pp. 711-721

Authors: Sun, S Fox, GR Hadnagy, TD

Citation: S. Sun et al., SBTN thin film capacitors prepared by RF-magnetron sputtering, INTEGR FERR, 26(1-4), 1999, pp. 733-739

Authors: Chu, F Hickert, G Hadnagy, TD Suu, KK

Citation: F. Chu et al., Ferroelectric properties of PLZT thin films prepared using ULVAC ZX-1000 sputtering system, INTEGR FERR, 26(1-4), 1999, pp. 749-757

Authors: Fox, GR Sun, S Eastep, B Hadnagy, TD

Citation: Gr. Fox et al., Comparison of CSD and sputtered PZT with iridium electrodes, INTEGR FERR, 26(1-4), 1999, pp. 917-925