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Results: 1-11 |
Results: 11
Silicon (110) grid for ion beam processing systems
Authors: Sawada, R Higurashi, E Shimokawa, F Ohguchi, O Tago, A
Citation: R. Sawada et al., Silicon (110) grid for ion beam processing systems, J MICROM M, 11(5), 2001, pp. 561-566
Optically driven angular alignment of microcomponents made of in-plane birefringent polyimide film based on optical angular momentum transfer
Authors: Higurashi, E Sawada, R Ito, T
Citation: E. Higurashi et al., Optically driven angular alignment of microcomponents made of in-plane birefringent polyimide film based on optical angular momentum transfer, J MICROM M, 11(2), 2001, pp. 140-145
Highly accurate and quick bonding of a laser-diode chip onto a planar lightwave circuit
Authors: Sawada, R Higurashi, E Ito, T
Citation: R. Sawada et al., Highly accurate and quick bonding of a laser-diode chip onto a planar lightwave circuit, PRECIS ENG, 25(4), 2001, pp. 293-300
Fabrication of microstructure using fluorinated polyimide and silicone-based positive photoresist
Authors: Ito, T Sawada, R Higurashi, E Kiyokura, T
Citation: T. Ito et al., Fabrication of microstructure using fluorinated polyimide and silicone-based positive photoresist, MICROSYST T, 6(5), 2000, pp. 165-168
Fabrication of micro IC probe for LSI testing
Authors: Takahiro, I Sawada, R Higurashi, E
Citation: I. Takahiro et al., Fabrication of micro IC probe for LSI testing, SENS ACTU-A, 80(2), 2000, pp. 126-131
Optically induced angular alignment of trapped birefringent micro-objects by linearly polarized light
Authors: Higurashi, E Sawada, R Ito, T
Citation: E. Higurashi et al., Optically induced angular alignment of trapped birefringent micro-objects by linearly polarized light, PHYS REV E, 59(3), 1999, pp. 3676-3681
Integrated micro focusing and tracking sensor
Authors: Sawada, R Shimada, J Higurashi, E Ito, T
Citation: R. Sawada et al., Integrated micro focusing and tracking sensor, J MICROM M, 9(1), 1999, pp. 71-77
Integrated microlaser Doppler velocimeter
Authors: Ito, T Sawada, R Higurashi, E
Citation: T. Ito et al., Integrated microlaser Doppler velocimeter, J LIGHTW T, 17(1), 1999, pp. 30-34
Nanometer-displacement detection of optically trapped metallic particles based on critical angle method for small force detection
Authors: Higurashi, E Sawada, R Ito, T
Citation: E. Higurashi et al., Nanometer-displacement detection of optically trapped metallic particles based on critical angle method for small force detection, REV SCI INS, 70(7), 1999, pp. 3068-3073
Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection
Authors: Higurashi, E Sawada, R Ito, T
Citation: E. Higurashi et al., Monolithically integrated optical displacement sensor based on triangulation and optical beam deflection, APPL OPTICS, 38(9), 1999, pp. 1746-1751
Monolithic-integrated microlaser encoder
Authors: Sawada, R Higurashi, E Ito, T Ohguchi, O Tsubamoto, M
Citation: R. Sawada et al., Monolithic-integrated microlaser encoder, APPL OPTICS, 38(33), 1999, pp. 6866-6873
Risultati: 1-11 |