Authors:
Iosad, NN
Jackson, BD
Polyakov, SN
Dmitriev, PN
Klapwijk, TM
Citation: Nn. Iosad et al., Reactive magnetron sputter-deposition of NbN and (Nb,Ti)N films related tosputtering source characterization and optimization, J VAC SCI A, 19(4), 2001, pp. 1840-1845
Authors:
Iosad, NN
Mijiritskii, AV
Roddatis, VV
van der Pers, NM
Jackson, BD
Gao, JR
Polyakov, SN
Dmitriev, PN
Klapwijk, TM
Citation: Nn. Iosad et al., Properties of (Nb-0.35, Ti-0.15)(x)Ni1-x thin films deposited on silicon wafers at ambient substrate temperature, J APPL PHYS, 88(10), 2000, pp. 5756-5759
Authors:
Iosad, NN
Jackson, BD
Klapwijk, TM
Polyakov, SN
Dmitriev, PN
Gao, JR
Citation: Nn. Iosad et al., Optimization of RF- and DC-sputtered NbTiN films for integration with Nb-based SIS junctions, IEEE APPL S, 9(2), 1999, pp. 1716-1719
Authors:
Iosad, NN
Klapwijk, TM
Polyakov, SN
Roddatis, VV
Kov'ev, EK
Dmitriev, PN
Citation: Nn. Iosad et al., Properties of DC magnetron sputtered Nb and NbN films for different sourceconditions, IEEE APPL S, 9(2), 1999, pp. 1720-1723
Authors:
Iosad, NN
Jackson, BD
Ferro, F
Gao, JR
Polyakov, SN
Dmitriev, PN
Klapwijk, TM
Citation: Nn. Iosad et al., Source optimization for magnetron sputter-deposition of NbTiN tuning elements for SIS THz detectors, SUPERCOND S, 12(11), 1999, pp. 736-740