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Results:
1-9
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Results: 9
Authors:
Jaing, CC
Lai, CH
Kao, HL
Chen, JS
Citation: Cc. Jaing et al., Deposition of high dielectric (Ba,Sr)TiO3 thin films by RF magnetron co-sputtering, INTEGR FERR, 33(1-4), 2001, pp. 343-352
Authors:
Jaing, CC
Cheng, MH
Chen, JS
Tsai, CH
Yeh, PS
Kao, JS
Hsiao, HY
Citation: Cc. Jaing et al., Studying layer uniformity of sputter coatings by intensity distribution ofplasma spectrum, APPL SURF S, 169, 2001, pp. 649-653
Authors:
Jaing, CC
Lee, CC
Hsu, JC
Tien, CL
Citation: Cc. Jaing et al., Making parabolic mirrors by electron-beam gun evaporation method with ion-assisted deposition, APPL SURF S, 169, 2001, pp. 654
Authors:
Hwang, CC
Juang, MH
Lai, MJ
Jaing, CC
Chen, JS
Huang, S
Cheng, HC
Citation: Cc. Hwang et al., Effect of rapid-thermal-annealed TiN barrier layer on the Pt/BST/Pt capacitors prepared by RF magnetron co-sputter technique at low substrate temperature, SOL ST ELEC, 45(1), 2001, pp. 121-125
Authors:
Lee, CC
Tien, CL
Sheu, WS
Jaing, CC
Citation: Cc. Lee et al., An apparatus for the measurement of internal stress and thermal expansion coefficient of metal oxide films, REV SCI INS, 72(4), 2001, pp. 2128-2133
Authors:
Hwang, CC
Lai, MJ
Jaing, CC
Chen, JS
Huang, S
Juang, MH
Cheng, HC
Citation: Cc. Hwang et al., Low-temperature process to improve the leakage current of (Ba, Sr)TiO3 films on Pt/TiN/Ti/Si substrates, JPN J A P 2, 39(12B), 2000, pp. L1314-L1316
Authors:
Hwang, CC
Jaing, CC
Lai, MJ
Chen, JS
Huang, S
Juang, MH
Cheng, HC
Citation: Cc. Hwang et al., Effect of rapid thermal annealed TiN barrier layer on BST capacitors prepared by RF magnetron cosputter system at low substrate temperatures, EL SOLID ST, 3(12), 2000, pp. 563-565
Authors:
Tien, CL
Lee, CC
Jaing, CC
Citation: Cl. Tien et al., The measurement of thin film stress using phase shifting interferometry, J MOD OPT, 47(5), 2000, pp. 839-849
Authors:
Tien, CL
Jaing, CC
Lee, CC
Chuang, KP
Citation: Cl. Tien et al., Simultaneous determination of the thermal expansion coefficient and the elastic modulus of Ta2O5 thin film using phase shifting interferometry, J MOD OPT, 47(10), 2000, pp. 1681-1691
Risultati:
1-9
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