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Results:
1-14
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Results: 14
Authors:
KOGLER R
YANKOV RA
KASCHNY JR
POSSELT M
DANILIN AB
SKORUPA W
Citation: R. Kogler et al., SPATIAL-DISTRIBUTION OF DEFECTS IN ION-IMPLANTED AND ANNEALED SI - THE RP 2 EFFECT/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 142(4), 1998, pp. 493-502
Authors:
SIAS US
SANCHEZ G
KASCHNY JR
AMARAL L
BEHAR M
FINK D
Citation: Us. Sias et al., POLYMER THERMAL-STABILITY ENHANCEMENT INDUCED BY HIGH-ENERGY ION-BEAMBOMBARDMENT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 141(1-4), 1998, pp. 187-192
Authors:
FICHTNER PFP
KASCHNY JR
KLING A
TRINKAUS H
YANKOV RA
MUCKLICH A
SKORUPA W
ZAWISLAK FC
AMARAL L
DASILVA MF
SOARES JC
Citation: Pfp. Fichtner et al., NUCLEATION AND GROWTH OF PLATELET BUBBLE STRUCTURES IN HE IMPLANTED SILICON, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 460-464
Authors:
KASCHNY JR
FICHTNER PFP
MUECKLICH A
KREISSIG U
YANKOV RA
SKORUPA W
Citation: Jr. Kaschny et al., HELIUM BUBBLES IN SILICON - STUDY OF THE RESIDUAL HELIUM CONTENT USING ELASTIC RECOIL DETECTION ANALYSIS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 138, 1998, pp. 583-586
Authors:
SIAS US
SANCHEZ G
KASCHNY JR
AMARAL L
BEHAR M
FINK D
Citation: Us. Sias et al., POLYMER THERMAL PROTECTION INDUCED BY ION-BEAM IRRADIATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 134(1), 1998, pp. 35-45
Authors:
ZAWISLAK FC
BEHAR M
FINK D
GRANDE PL
DAJORNADA JAH
KASCHNY JR
Citation: Fc. Zawislak et al., VERY LARGE SPUTTERING YIELDS OF ION-IRRADIATED C-60 FILMS, Physics letters. A, 226(3-4), 1997, pp. 217-222
Authors:
FINK D
KLETT R
BEHAR M
SANCHEZ G
KASCHNY JR
HERTLEIN WG
Citation: D. Fink et al., CHANGES IN THE PHOTORESIST INHIBITOR DISTRIBUTION AFTER ION IRRADIATION AND THERMAL-TREATMENT, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 132(4), 1997, pp. 660-670
Authors:
KASCHNY JR
PEREZ R
BEHAR M
HOFSAESS H
FINK D
Citation: Jr. Kaschny et al., RANGE PARAMETER STUDY OF AU AND BI IMPLANTED INTO CARBON NITRIDE FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 122(1), 1997, pp. 8-12
Authors:
YANKOV RA
KASCHNY JR
FICHTNER PFP
MUCKLICH A
KREISSIG U
SKORUPA W
Citation: Ra. Yankov et al., IMPURITY GETTERING EFFECTS IN SEPARATION-BY-IMPLANTED-OXYGEN (SIMOX) WAFERS - WHAT GETTERS WHAT, WHERE AND HOW, Microelectronic engineering, 36(1-4), 1997, pp. 129-132
Authors:
FICHTNER PFP
KASCHNY JR
YANKOV RA
MUCKLICH A
KREISSIG U
SKORUPA W
Citation: Pfp. Fichtner et al., OVERPRESSURIZED BUBBLES VERSUS VOIDS FORMED IN HELIUM IMPLANTED AND ANNEALED SILICON, Applied physics letters, 70(6), 1997, pp. 732-734
Authors:
KASCHNY JR
BEHAR M
Citation: Jr. Kaschny et M. Behar, ANOMALOUS DEPTH PROFILES AND DIFFUSIONAL BEHAVIOR OF NOBLE-GASES IMPLANTED INTO PHOTORESIST FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 116(1-4), 1996, pp. 225-229
Authors:
KASCHNY JR
BEHAR M
Citation: Jr. Kaschny et M. Behar, DIFFUSION STUDY OF KR, RB AND XE IMPLANTED INTO POSITIVE AND NEGATIVEPHOTORESIST FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 111(1-2), 1996, pp. 51-58
Authors:
KASCHNY JR
BEHAR M
Citation: Jr. Kaschny et M. Behar, THERMAL-DIFFUSION STUDY OF XE AND CS IMPLANTED INTO A POLYMER FILM, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 88(3), 1994, pp. 267-274
Authors:
KASCHNY JR
AMARAL L
FINK D
BEHAR M
Citation: Jr. Kaschny et al., RADIATION-INDUCED DIFFUSION OF XE TO A POLYMER FILM, Radiation effects and defects in solids, 125(4), 1993, pp. 289-298
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1-14
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