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Results:
1-16
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Results: 16
Authors:
RANGSTEN P
HEDLUND C
KATARDJIEV IV
BACKLUND Y
Citation: P. Rangsten et al., ETCH RATES OF CRYSTALLOGRAPHIC PLANES IN Z-CUT QUARTZ - EXPERIMENTS AND SIMULATION, Journal of micromechanics and microengineering, 8(1), 1998, pp. 1-6
Authors:
HEDLUND C
JONSSON LB
KATARDJIEV IV
BERG S
BLOM HO
Citation: C. Hedlund et al., ANGULAR-DEPENDENCE OF THE POLYSILICON ETCH RATE DURING DRY-ETCHING INSF6 AND CL-2, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(3), 1997, pp. 686-691
Authors:
HEDLUND C
STRANDMAN C
KATARDJIEV IV
BACKLUND Y
BERG S
BLOM HO
Citation: C. Hedlund et al., METHOD FOR THE DETERMINATION OF THE ANGULAR-DEPENDENCE DURING DRY-ETCHING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(5), 1996, pp. 3239-3243
Authors:
BERG S
KATARDJIEV IV
Citation: S. Berg et Iv. Katardjiev, SYNERGISTIC SPUTTERING EFFECTS DURING ION-BOMBARDMENT WITH 2 ION SPECIES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(3), 1995, pp. 831-833
Authors:
JONSSON LB
HEDLUND C
KATARDJIEV IV
BARKLUND AM
BLOM HO
BERG S
Citation: Lb. Jonsson et al., CONTROLLED TOPOGRAPHY PRODUCTION - TRUE 3D SIMULATION AND EXPERIMENT, Vacuum, 46(8-10), 1995, pp. 971-975
Authors:
NENDER C
KATARDJIEV IV
BIERSACK JP
BERG S
BARKLUND AM
Citation: C. Nender et al., NUMERICAL AND EXPERIMENTAL STUDIES OF THE SPUTTER YIELD AMPLIFICATIONEFFECT, Radiation effects and defects in solids, 130, 1994, pp. 281-291
Authors:
KATARDJIEV IV
CARTER G
NOBES MJ
BERG S
NENDER C
Citation: Iv. Katardjiev et al., THE STEADY-STATE IN NET EROSION AND NET GROWTH REGIMES DURING SIMULTANEOUS ION-BOMBARDMENT AND ATOMIC DEPOSITION PROCESSES, Radiation effects and defects in solids, 129(3-4), 1994, pp. 315-333
Authors:
HEDLUND C
CARLSSON P
BLOM HO
BERG S
KATARDJIEV IV
Citation: C. Hedlund et al., PREFERENTIAL SPUTTERING OF SILICON FROM METAL SILICIDES AT ELEVATED-TEMPERATURES, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(4), 1994, pp. 1542-1546
Authors:
KATARDJIEV IV
CARTER G
NOBES MJ
BERG S
BLOM HO
Citation: Iv. Katardjiev et al., 3-DIMENSIONAL SIMULATION OF SURFACE EVOLUTION DURING GROWTH AND EROSION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(1), 1994, pp. 61-68
Authors:
BERG S
KATARDJIEV IV
Citation: S. Berg et Iv. Katardjiev, MODELING OF BIAS SPUTTER-DEPOSITION PROCESSES, Surface & coatings technology, 68, 1994, pp. 325-331
Authors:
VERHOEVEN J
KEPPEL A
SCHLATMANN R
XUE Y
KATARDJIEV IV
Citation: J. Verhoeven et al., X-RAY REFLECTION, A TECHNIQUE FOR MEASURING SPUTTERING YIELDS OF THIN-FILMS, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 94(4), 1994, pp. 395-403
Authors:
BERG S
KATARDJIEV IV
NENDER C
CARLSSON P
Citation: S. Berg et al., LARGE-AREA SELECTIVE THIN-FILM DEPOSITION BY BIAS SPUTTERING, Thin solid films, 241(1-2), 1994, pp. 1-8
Authors:
CARTER G
NOBES MJ
KATARDJIEV IV
Citation: G. Carter et al., THE PRODUCTION OF REPETITIVE SURFACE-FEATURES BY OBLIQUE-INCIDENCE ION-BOMBARDMENT, Philosophical magazine. B. Physics of condensed matter. Structural, electronic, optical and magnetic properties, 68(2), 1993, pp. 231-236
Authors:
CARLSSON P
BERG S
BELKIND A
KATARDJIEV IV
Citation: P. Carlsson et al., SERIAL COSPUTTERING OF METALS - MODELING OF SPUTTERING FROM A PERIODICALLY CODEPOSITED SURFACE, Surface & coatings technology, 61(1-3), 1993, pp. 287-292
Authors:
CARTER G
NOBES MJ
KATARDJIEV IV
ABRIL I
GRASMARTI A
JIMENEZRODRIGUEZ JJ
PEINADOR JA
Citation: G. Carter et al., THE EFFECTS OF MODEL PARAMETER VARIATIONS ON HIGH-FLUENCE ION-IMPLANTATION, Vacuum, 44(8), 1993, pp. 783-789
Authors:
NENDER C
KATARDJIEV IV
BARKLUND AM
BERG S
CARLSSON P
Citation: C. Nender et al., HIGH BIAS SPUTTERING FOR LARGE-AREA SELECTIVE DEPOSITION, Thin solid films, 228(1-2), 1993, pp. 87-90
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