Authors:
KIM HS
YU ML
THOMSON MGR
KRATSCHMER E
CHANG THP
Citation: Hs. Kim et al., PERFORMANCE OF ZR O/W SCHOTTKY EMITTERS AT REDUCED TEMPERATURES/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2284-2288
Authors:
CHANG THP
THOMSON MGR
KRATSCHMER E
KIM HS
YU ML
LEE KY
RISHTON SA
HUSSEY BW
ZOLGHARNAIN S
Citation: Thp. Chang et al., ELECTRON-BEAM MICROCOLUMNS FOR LITHOGRAPHY AND RELATED APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3774-3781
Authors:
KRATSCHMER E
KIM HS
THOMSON MGR
LEE KY
RISHTON SA
YU ML
ZOLGHARNAIN S
HUSSEY BW
CHANG THP
Citation: E. Kratschmer et al., EXPERIMENTAL EVALUATION OF A 20X20 MM FOOTPRINT MICROCOLUMN, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3792-3796
Authors:
YU ML
HUSSEY BW
KRATSCHMER E
CHANG THP
MACKIE WA
Citation: Ml. Yu et al., IMPROVED EMISSION STABILITY OF CARBURIZED HFC[100] AND ULTRASHARP TUNGSTEN FIELD EMITTERS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2436-2440
Authors:
KIM HS
YU ML
KRATSCHMER E
HUSSEY BW
THOMSON MGR
CHANG THP
Citation: Hs. Kim et al., MINIATURE SCHOTTKY ELECTRON SOURCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2468-2472
Authors:
KRATSCHMER E
KIM HS
THOMSON MGR
LEE KY
RISHTON SA
YU ML
CHANG THP
Citation: E. Kratschmer et al., AN ELECTRON-BEAM MICROCOLUMN WITH IMPROVED RESOLUTION, BEAM CURRENT, AND STABILITY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2498-2503
Authors:
KLEINDIEK S
KIM HS
KRATSCHMER E
CHANG THP
Citation: S. Kleindiek et al., MINIATURE 3-AXIS MICROPOSITIONER FOR SCANNING PROXIMAL PROBE AND OTHER APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2653-2656
Authors:
KIM HS
KRATSCHMER E
YU ML
THOMSON MGR
CHANG THP
Citation: Hs. Kim et al., EVALUATION OF ZR O/W SCHOTTKY EMITTERS FOR MICROCOLUMN APPLICATIONS/, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3413-3417