ACNP - Italian Periodicals Catalogue

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Results: 10

LIFETIME ENHANCEMENT OF A MULTICUSP ION-SOURCE FOR LITHOGRAPHY

Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN VUJIC J WILLIAMS MD WUTTE D YANG FL

Citation: Y. Lee et al., LIFETIME ENHANCEMENT OF A MULTICUSP ION-SOURCE FOR LITHOGRAPHY, Microelectronic engineering, 42, 1998, pp. 241-244

MULTICUSP SOURCES FOR ION-BEAM PROJECTION LITHOGRAPHY

Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN VUJIC J WILLIAMS MD WUTTE D ZAHIR N

Citation: Y. Lee et al., MULTICUSP SOURCES FOR ION-BEAM PROJECTION LITHOGRAPHY, Review of scientific instruments, 69(2), 1998, pp. 877-879

AXIAL ENERGY SPREAD MEASUREMENTS OF AN ACCELERATED POSITIVE-ION BEAM

Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD WUTTE D MONDELLI AA STENGL G

Citation: Y. Lee et al., AXIAL ENERGY SPREAD MEASUREMENTS OF AN ACCELERATED POSITIVE-ION BEAM, Nuclear instruments & methods in physics research. Section A, Accelerators, spectrometers, detectors and associated equipment, 385(2), 1997, pp. 204-208

ION ENERGY SPREAD AND CURRENT MEASUREMENTS OF THE RF-DRIVEN MULTICUSPION-SOURCE

Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD WUTTE D

Citation: Y. Lee et al., ION ENERGY SPREAD AND CURRENT MEASUREMENTS OF THE RF-DRIVEN MULTICUSPION-SOURCE, Review of scientific instruments, 68(3), 1997, pp. 1398-1402

DEVELOPMENT OF ION SOURCES FOR ION PROJECTION LITHOGRAPHY

Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD

Citation: Y. Lee et al., DEVELOPMENT OF ION SOURCES FOR ION PROJECTION LITHOGRAPHY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3947-3950

A COMPACT FILAMENT-DRIVEN MULTICUSP ION-SOURCE

Authors: LEE Y GOUGH RA KUNKEL WB LEUNG KN PERKINS LT PICKARD DS SUN L VUJIC J WILLIAMS MD WUTTE D

Citation: Y. Lee et al., A COMPACT FILAMENT-DRIVEN MULTICUSP ION-SOURCE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 119(4), 1996, pp. 543-548

PLASMA PRODUCTION VIA LASER-INDUCED PHOTOEMISSION

Authors: PICKARD DS KUNKEL WB LEUNG KN YOUNG AT

Citation: Ds. Pickard et al., PLASMA PRODUCTION VIA LASER-INDUCED PHOTOEMISSION, Review of scientific instruments, 67(4), 1996, pp. 1666-1669

PERFORMANCE CHARACTERIZATION OF RF-DRIVEN MULTICUSP ION SOURCES

Authors: PERKINS LT DEVRIES GJ HERZ PR KUNKEL WB LEUNG KN PICKARD DS WENGROW A WILLIAMS MD

Citation: Lt. Perkins et al., PERFORMANCE CHARACTERIZATION OF RF-DRIVEN MULTICUSP ION SOURCES, Review of scientific instruments, 67(3), 1996, pp. 1057-1059

PLASMA PRODUCTION VIA LASER-INDUCED PHOTOEMISSION

Authors: PICKARD DS KUNKEL WB LEUNG KN YOUNG AT

Citation: Ds. Pickard et al., PLASMA PRODUCTION VIA LASER-INDUCED PHOTOEMISSION, Review of scientific instruments, 67(3), 1996, pp. 1340-1340

MULTICUSP SOURCES FOR ION-BEAM LITHOGRAPHY APPLICATIONS

Authors: LEUNG KN HERZ P KUNKEL WB LEE Y PERKINS L PICKARD D SARSTEDT M WEBER M WILLIAMS MD

Citation: Kn. Leung et al., MULTICUSP SOURCES FOR ION-BEAM LITHOGRAPHY APPLICATIONS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 2600-2602

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