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Results: 1-9 |
Results: 9
Micromachined structures for thermal measurements of fluid and flow parameters
Authors: van Baar, JJ Wiegerink, RJ Lammerink, TSJ Krijnen, GJM Elwenspoek, M
Citation: Jj. Van Baar et al., Micromachined structures for thermal measurements of fluid and flow parameters, J MICROM M, 11(4), 2001, pp. 311-318
Selective wafer bonding by surface roughness control
Authors: Gui, C Oosterbroek, RE Berenschot, JW Schlautmann, S Lammerink, TSJ van den Berg, A Elwenspoek, MC
Citation: C. Gui et al., Selective wafer bonding by surface roughness control, J ELCHEM SO, 148(4), 2001, pp. G225-G228
Low-cost piezoresistive silicon load cell independent of force distribution
Authors: Zwijze, RAF Wiegerink, RJ Krijnen, GJM Lammerink, TSJ Elwenspoek, M
Citation: Raf. Zwijze et al., Low-cost piezoresistive silicon load cell independent of force distribution, J MICROM M, 10(2), 2000, pp. 200-203
Bi-directional fast flow sensor with a large dynamic range
Authors: de Bree, HE Jansen, HV Lammerink, TSJ Krijnen, GJM Elwenspoek, M
Citation: He. De Bree et al., Bi-directional fast flow sensor with a large dynamic range, J MICROM M, 9(2), 1999, pp. 186-189
Designing, simulation and realization of in-plane operating micro valves, using new etching techniques
Authors: Oosterbroek, RE Berenschot, JW Schlautmann, S Krijnen, GJM Lammerink, TSJ Elwenspoek, MC van den Berg, A
Citation: Re. Oosterbroek et al., Designing, simulation and realization of in-plane operating micro valves, using new etching techniques, J MICROM M, 9(2), 1999, pp. 194-198
Characterization method for a new diffusion mixer applicable in micro flowinjection analysis systems
Authors: Veenstra, TT Lammerink, TSJ Elwenspoek, MC van den Berg, A
Citation: Tt. Veenstra et al., Characterization method for a new diffusion mixer applicable in micro flowinjection analysis systems, J MICROM M, 9(2), 1999, pp. 199-202
Optical devices based on fluidic controlled two-mode interference
Authors: Krijnen, GJM Lammerink, TSJ Lambeck, PV Elwenspoek, M
Citation: Gjm. Krijnen et al., Optical devices based on fluidic controlled two-mode interference, J MICROM M, 9(2), 1999, pp. 203-205
Low creep and hysteresis load cell based on a force-to-fluid pressure transformation
Authors: Zwijze, RAF Wiegerink, RJ Krijnen, GJM Lammerink, TSJ Elwenspoek, M
Citation: Raf. Zwijze et al., Low creep and hysteresis load cell based on a force-to-fluid pressure transformation, SENS ACTU-A, 78(2-3), 1999, pp. 74-80
A micromachined pressure/flow-sensor
Authors: Oosterbroek, RE Lammerink, TSJ Berenschot, JW Krijnen, GJM Elwenspoek, MC van den Berg, A
Citation: Re. Oosterbroek et al., A micromachined pressure/flow-sensor, SENS ACTU-A, 77(3), 1999, pp. 167-177
Risultati: 1-9 |