Authors:
Lungu, CP
Lungu, AM
Akazawa, M
Sakai, Y
Sugawara, H
Tabata, M
Citation: Cp. Lungu et al., Fluorinated carbon films with low dielectric constant made from novel fluorocarbon source materials by RF plasma enhanced chemical vapor deposition, JPN J A P 2, 38(12B), 1999, pp. L1544-L1546
Authors:
Musa, G
Baltog, A
Bajeu, G
Lungu, CP
Raiciu, E
Borcoman, I
Ricard, A
Citation: G. Musa et al., Influence of the H-2 and SF6 addition to Ne+1%Xe on the narrow barrier discharge spectral radiation, EPJ-APPL PH, 4(2), 1998, pp. 165-169
Authors:
Lungu, CP
Futsuhara, M
Takai, O
Braic, M
Musa, G
Citation: Cp. Lungu et al., Noble gas influence on reactive radio frequency magnetron sputter deposition of TiN films, VACUUM, 51(4), 1998, pp. 635-640
Citation: Sq. Xiao et al., Comparison of TiN deposition by rf magnetron sputtering and electron beam sustained arc ion plating, THIN SOL FI, 334(1-2), 1998, pp. 173-177