Authors:
YARALIOGLU GG
ATALAR A
MANALIS SR
QUATE CF
Citation: Gg. Yaralioglu et al., ANALYSIS AND DESIGN OF AN INTERDIGITAL CANTILEVER AS A DISPLACEMENT SENSOR, Journal of applied physics, 83(12), 1998, pp. 7405-7415
Authors:
MANALIS SR
MINNE SC
QUATE CF
YARALIOGLU GG
ATALAR A
Citation: Sr. Manalis et al., 2-DIMENSIONAL MICROMECHANICAL BIMORPH ARRAYS FOR DETECTION OF THERMAL-RADIATION, Applied physics letters, 70(24), 1997, pp. 3311-3313
Citation: Sc. Minne et al., INDEPENDENT PARALLEL LITHOGRAPHY USING THE ATOMIC-FORCE MICROSCOPE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(4), 1996, pp. 2456-2461
Citation: Sr. Manalis et al., HIGH-SPEED ATOMIC-FORCE MICROSCOPY USING AN INTEGRATED ACTUATOR AND OPTICAL-LEVER DETECTION, Review of scientific instruments, 67(9), 1996, pp. 3294-3297
Citation: Sr. Manalis et al., ATOMIC-FORCE MICROSCOPY FOR HIGH-SPEED IMAGING USING CANTILEVERS WITHAN INTEGRATED ACTUATOR AND SENSOR, Applied physics letters, 68(6), 1996, pp. 871-873
Citation: Sc. Minne et al., CONTACT IMAGING IN THE ATOMIC-FORCE MICROSCOPE USING A HIGHER-ORDER FLEXURAL MODE COMBINED WITH A NEW SENSOR, Applied physics letters, 68(10), 1996, pp. 1427-1429
Citation: Sc. Minne et al., PARALLEL ATOMIC-FORCE MICROSCOPY USING CANTILEVERS WITH INTEGRATED PIEZORESISTIVE SENSORS AND INTEGRATED PIEZOELECTRIC ACTUATORS, Applied physics letters, 67(26), 1995, pp. 3918-3920