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QUINN LJ
LEE B
BAINE PT
MITCHELL SJN
ARMSTRONG BM
GAMBLE HS
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Authors:
WU Y
MONTGOMERY JH
REFSUM A
MITCHELL SJN
ARMSTRONG BM
GAMBLE HS
Citation: Y. Wu et al., LARGE-AREA SHOWER IMPLANTER FOR THIN-FILM TRANSISTORS, IEE proceedings. Part G. Circuits, devices and systems, 141(1), 1994, pp. 23-26