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NAKAMURA N
ARAKAKI Y
SUNAGAWA H
SHIOHIRA Y
UEHARA H
MIYASATO T
KOYAMA Y
OGAWA Y
KOWATARI T
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Citation: Y. Sun et T. Miyasato, CHARACTERIZATION OF CUBIC SIC FILMS GROWN ON THERMALLY OXIDIZED SI SUBSTRATE, Journal of applied physics, 84(5), 1998, pp. 2602-2611
Citation: Y. Sun et al., OUTDIFFUSION OF THE EXCESS CARBON IN SIC FILMS INTO SI SUBSTRATE DURING FILM GROWTH, Journal of applied physics, 84(11), 1998, pp. 6451-6453
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Authors:
SUN Y
MIYASATO T
WIGMORE JK
SONODA N
WATARI Y
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Citation: Y. Sun et al., STUDY OF THE GROWTH-MECHANISM OF NANOCRYSTALLINE SI-H FILMS PREPARED BY REACTIVE HYDROGEN PLASMA SPUTTERING OF SILICON, JPN J A P 2, 33(12A), 1994, pp. 120001645-120001648