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Vieu, C
Lebib, A
Chen, Y
Manin-Ferlazzo, L
Launois, H
Citation: F. Carcenac et al., Fabrication of high density nanostructures gratings (> 500Gbit/in(2)) usedas molds for nanoimprint lithography, MICROEL ENG, 53(1-4), 2000, pp. 163-166
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Manin-Ferlazzo, L
Carcenac, F
Teissier, R
Faini, G
Mailly, D
Citation: L. Manin-ferlazzo et al., Damage characterization of anisotropic InP patterns obtained by SiCl4 reactive ion etching, MICROEL ENG, 46(1-4), 1999, pp. 331-334
Authors:
Rivera, T
Debray, JP
Gerard, JM
Legrand, B
Manin-Ferlazzo, L
Oudar, JL
Citation: T. Rivera et al., Optical losses in plasma-etched AlGaAs microresonators using reflection spectroscopy, APPL PHYS L, 74(7), 1999, pp. 911-913