Authors:
GILES LF
MARSH CD
NEJIM A
HEMMENT PLF
BOOKER GR
Citation: Lf. Giles et al., CRYSTALLOGRAPHIC DEFECT STUDIES IN SIMOX MATERIAL THINNED BY SACRIFICIAL OXIDATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(2), 1994, pp. 242-247
Authors:
NEJIM A
MARSH CD
GILES LF
HEMMENT PLF
LI Y
CHATER RJ
KILNER JA
BOOKER GR
Citation: A. Nejim et al., AN INVESTIGATION OF THE ROLE OF THE TIME-AVERAGED ION-BEAM CURRENT-DENSITY UPON THE DEFECT DENSITIES IN THIN-FILM SIMOX, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(2), 1994, pp. 248-253
Authors:
GEATCHES RM
REESON KJ
CRIDDLE AJ
WEBB RP
PEARSON PJ
HEMMENT PLF
NEJIM A
Citation: Rm. Geatches et al., NONDESTRUCTIVE CHARACTERIZATION OF SIMOX STRUCTURES, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 84(2), 1994, pp. 258-264
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Authors:
NEJIM A
LI Y
MARSH CD
HEMMENT PLF
CHATER RJ
KILNER JA
BOOKER GR
Citation: A. Nejim et al., DIRECT FORMATION OF DEVICE WORTHY THIN-FILM SIMOX STRUCTURES BY LOW-ENERGY OXYGEN IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 822-826
Authors:
LIN C
LI Y
KILNER JA
CHATER RJ
LI J
NEJIM A
ZHANG JP
HEMMENT PLF
Citation: C. Lin et al., INVESTIGATION OF BURIED ALN LAYERS FORMED BY NITROGEN IMPLANTATION INTO AL, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 323-326
Authors:
LI Y
KILNER JA
CHATER RJ
NEJIM A
HEMMENT PLF
TATE TJ
Citation: Y. Li et al., AN INVESTIGATION OF AS-IMPLANTED MATERIAL FORMED BY HIGH-DOSE 40 KEV OXYGEN IMPLANTATION INTO SILICON AT 550-DEGREES-C, Journal of applied physics, 74(1), 1993, pp. 82-85
Citation: Lf. Giles et al., NEW ETCHANT FOR CRYSTALLOGRAPHIC DEFECT STUDIES IN THIN SOI MATERIALS(LESS-THAN-1000 A-ANGSTROM), Electronics Letters, 29(9), 1993, pp. 788-789
Authors:
LI Y
KILNER JA
CHATER RJ
HEMMENT PLF
NEJIM A
ROBINSON AK
REESON KJ
MARSH CD
BOOKER GR
Citation: Y. Li et al., THE EFFECTS OF DOSE AND TARGET TEMPERATURE ON LOW-ENERGY SIMOX LAYERS, Journal of the Electrochemical Society, 140(6), 1993, pp. 1780-1786
Authors:
LI YP
KILNER JA
CHATER RJ
NEJIM A
HEMMENT PLF
MARSH CD
BOOKER GR
Citation: Yp. Li et al., OXYGEN ISOTOPIC EXCHANGE BETWEEN AN O-18-TEMPERATURE ANNEALING( SI LAYER AND A NATURAL SIO2 CAPPING LAYER DURING HIGH), Applied physics letters, 63(20), 1993, pp. 2812-2814