Authors: ANDERSOHN L KOCHANSKI GP NORMAN JAT HINCH BJ

Citation: L. Andersohn et al., INTERACTION OF VINYLTRIMETHYLSILANE WITH THE SI(111)-(7X7) SURFACE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 1032-1037

Authors: PARMETER JE PETERSEN GA SMITH PM APBLETT CA REID JS NORMAN JAT HOCHBERG AK ROBERTS DA OMSTEAD TR

Citation: Je. Parmeter et al., CHARACTERIZATION OF THIN COPPER-FILMS GROWN VIA CHEMICAL-VAPOR-DEPOSITION USING LIQUID COINJECTION OF TRIMETHYLVINYLSILANE AND (HEXAFLUOROACETYLACETONATE) CU (TRIMETHYLVINYLSILANE), Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(1), 1995, pp. 130-136

Authors: NORMAN JAT ROBERTS DA HOCHBERG AK SMITH P PETERSEN GA PARMETER JE APBLETT CA OMSTEAD TR

Citation: Jat. Norman et al., CHEMICAL ADDITIVES FOR IMPROVED COPPER CHEMICAL-VAPOR-DEPOSITION PROCESSING, Thin solid films, 262(1-2), 1995, pp. 46-51

Authors: PETERSEN GA PARMETER JE APBLETT CA GONZALES MF SMITH PM OMSTEAD TR NORMAN JAT

Citation: Ga. Petersen et al., ENHANCED CHEMICAL-VAPOR-DEPOSITION OF COPPER FROM (HFAC)CU(TMVS) USING LIQUID COINJECTION OF TMVS, Journal of the Electrochemical Society, 142(3), 1995, pp. 939-944