Authors:
CZARNETZKI U
MIYAZAKI K
KAJIWARA T
MURAOKA K
OKADA T
MAEDA M
SUZUKI A
MATSUDA A
Citation: U. Czarnetzki et al., 2-PHOTON LASER-INDUCED FLUORESCENCE MEASUREMENTS OF ABSOLUTE ATOMIC-HYDROGEN DENSITIES AND POWDER FORMATION IN A SILANE DISCHARGE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 831-834