Authors:
KAABI L
GONTRAND C
PINARD P
BALLAND B
REMAKI B
GAMOUDI M
GUILLAUD G
Citation: L. Kaabi et al., IONIC IMPLANTATION AT LOW-ENERGY - APPLICATION TO THE SHALLOW JUNCTION ACCOMPLISHMENT AND SURFACE FUNCTIONALIZATION, Synthetic metals, 90(3), 1997, pp. 217-221
Authors:
LEBERRE M
KLEIMANN P
SEMMACHE B
BARBIER D
PINARD P
Citation: M. Leberre et al., ELECTRICAL AND PIEZORESISTIVE CHARACTERIZATION OF BORON-DOPED LPCVD POLYCRYSTALLINE SILICON UNDER RAPID THERMAL ANNEALING, Sensors and actuators. A, Physical, 54(1-3), 1996, pp. 700-703
Authors:
SEMMACHE B
KLEIMANN P
LEBERRE M
LEMITI M
BARBIER D
PINARD P
Citation: B. Semmache et al., RAPID THERMAL-PROCESSING OF PIEZORESISTIVE POLYCRYSTALLINE SILICON FILMS - AN INNOVATIVE TECHNOLOGY FOR LOW-COST PRESSURE SENSOR FABRICATION, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 76-81
Authors:
LEBERRE M
LEMITI M
BARBIER D
PINARD P
CALI J
BUSTARRET E
SICART J
ROBERT JL
Citation: M. Leberre et al., PIEZORESISTANCE OF BORON-DOPED PECVD AND LPCVD POLYCRYSTALLINE SILICON FILMS, Sensors and actuators. A, Physical, 46(1-3), 1995, pp. 166-170
Authors:
KOLIC Y
GAUTHIER R
PEREZ MAG
SIBAI A
DUPUY JC
PINARD P
MGHAIETH R
MAAREF H
Citation: Y. Kolic et al., ELECTRON POWDER RIBBON POLYCRYSTALLINE SILICON PLATES USED FOR POROUSLAYER FABRICATION, Thin solid films, 255(1-2), 1995, pp. 159-162
Authors:
JEANJEAN P
SICART J
SELLITTO P
ROBERT JL
BUSTARRET E
GRIESHABER W
CALI J
LEBERRE M
LEMITI M
PINARD P
CONEDERA V
Citation: P. Jeanjean et al., ELECTRICAL AND STRUCTURAL-PROPERTIES OF RAPID THERMALLY ANNEALED BORON-DOPED SILICON FILMS DEPOSITED BY PLASMAS-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Journal of applied physics, 76(8), 1994, pp. 4682-4688
Authors:
SOF S
KOLIC Y
GAUTHIER R
ETIENNE S
PINARD P
Citation: S. Sof et al., DEVELOPMENT OF A NEW CRYSTAL-GROWTH PROCESS USING A SEMICONDUCTOR POWDER AND REDUCING THE THERMAL-STRESSES, Materials science & engineering. A, Structural materials: properties, microstructure and processing, 173(1-2), 1993, pp. 55-58