Authors:
Savkina, NS
Lebedev, AA
Davydov, DV
Strel'chuk, AM
Tregubova, AS
Raynaud, C
Chante, JP
Locatelli, ML
Planson, D
Milan, J
Godignon, P
Campos, FJ
Mestres, N
Pascual, J
Brezeanu, G
Badila, M
Citation: Ns. Savkina et al., Low-doped 6H-SiC n-type epilayers grown by sublimation epitaxy, MAT SCI E B, 77(1), 2000, pp. 50-54
Authors:
Lanois, F
Planson, D
Locatelli, ML
Lassagne, P
Jaussaud, C
Chante, JP
Citation: F. Lanois et al., Chemical contribution of oxygen to silicon carbide plasma etching kineticsin a distributed electron cyclotron resonance (DECR) reactor, J ELEC MAT, 28(3), 1999, pp. 219-224