Authors:
QUINN LJ
LEE B
BAINE PT
MITCHELL SJN
ARMSTRONG BM
GAMBLE HS
Citation: Lj. Quinn et al., DEPOSITION AND CHARACTERIZATION OF SILICON GROWN IN A SIF4 SIH4/H-2 MIXTURE FOR TFT APPLICATIONS/, Thin solid films, 296(1-2), 1997, pp. 7-10
Citation: Lj. Quinn et al., PLASMA-ENHANCED SILICON-NITRIDE DEPOSITION FOR THIN-FILM-TRANSISTOR APPLICATIONS, Journal of non-crystalline solids, 187, 1995, pp. 347-352