Authors:
SANCHEZ S
ELWENSPOEK M
GUI CQ
DENIVELLE MJME
DEVRIES R
DEKORTE PAJ
BRUIJN MP
WIJNBERGEN JJ
MICHALKE W
STEINBEISS E
HEIDENBLUT T
SCHWIERZI B
Citation: S. Sanchez et al., A HIGH-T-C SUPERCONDUCTOR BOLOMETER ON A SILICON-NITRIDE MEMBRANE, Journal of microelectromechanical systems, 7(1), 1998, pp. 62-68
Citation: G. Friese et al., INFLUENCE OF PROCESSING PARAMETERS ON THE SELECTIVITY IN A CVD-PROCESS OF COPPER USING CU(I)(HFAC)(TMVS), Microelectronic engineering, 37-8(1-4), 1997, pp. 157-163
Authors:
AHRENS C
FRIESE G
FERRETTI R
SCHWIERZI B
HASSE W
Citation: C. Ahrens et al., ELECTRICAL CHARACTERIZATION OF TIN TISI2 AND WN/TISI2 CU-DIFFUSION BARRIERS USING SCHOTTKY DIODES/, Microelectronic engineering, 33(1-4), 1997, pp. 301-307
Authors:
DENIVELLE MJME
BRUIJN MP
DEVRIES R
WIJNBERGEN JJ
DEKORTE PAJ
SANCHEZ S
ELWENSPOEK M
HEIDENBLUT T
SCHWIERZI B
MICHALKE W
STEINBEISS E
Citation: Mjme. Denivelle et al., LOW-NOISE HIGH-T-C SUPERCONDUCTING BOLOMETERS ON SILICON-NITRIDE MEMBRANES FOR FAR-INFRARED DETECTION, Journal of applied physics, 82(10), 1997, pp. 4719-4726
Authors:
DENIVELLE MJME
BRUIJN MP
FRERICKS M
DEVRIES R
WIJNBERGEN JJ
DEKORTE PAJ
SANCHEZ S
ELWENSPOEK M
HEIDENBLUT T
SCHWIERZI B
MICHALKE W
STEINBEISS E
Citation: Mjme. Denivelle et al., A HIGH-T-C SUPERCONDUCTOR BOLOMETER FOR REMOTE-SENSING OF ATMOSPHERICOH, Journal de physique. IV, 6(C3), 1996, pp. 423-428
Authors:
STEINBEISS E
MICHALKE W
NEFF H
SCHWIERZI B
Citation: E. Steinbeiss et al., COMBINED PHOTODIODE AND HIGH-TC TRANSITION EDGE BOLOMETER FUNCTION ONZIRCONIA BUFFERED SILICON MEMBRANES, IEEE transactions on applied superconductivity, 5(2), 1995, pp. 2416-2418
Authors:
BURNUS M
HEIDENBLUT T
HEFLE G
SEMTCHINOVA OK
SCHWIERZI B
MICHALKE W
STEINBEISS E
NEFF H
LAUKEMPER J
Citation: M. Burnus et al., REDUCED TEMPERATURE PROCESSING OF YSZ BUFFER LAYERS FOR HTSC TRANSITION EDGE BOLOMETERS, IEEE transactions on applied superconductivity, 5(2), 1995, pp. 2419-2422
Authors:
NEFF H
SCHAUBE W
LAUKEMPER J
BURNUS M
HEIDENBLUT T
HEFLE G
SCHWIERZI B
MICHALKE W
STEINBEISS E
Citation: H. Neff et al., EXCESS NOISE, STRUCTURAL-PROPERTIES, AND THEIR EFFECTS ON BOLOMETRIC PERFORMANCE OF THIN SUPERCONDUCTING FILMS ON SILICON MEMBRANES, Journal of applied physics, 77(9), 1995, pp. 4580-4583
Authors:
NEFF H
LAUKEMPER J
KHREBTOV IA
TKACHENKO AD
STEINBEISS E
MICHALKE W
BURNUS M
HEIDENBLUT T
HEFLE G
SCHWIERZI B
Citation: H. Neff et al., SENSITIVE HIGH-T-C TRANSITION EDGE BOLOMETER ON A MICROMACHINED SILICON MEMBRANE, Applied physics letters, 66(18), 1995, pp. 2421-2423