Authors:
KOBAYASHI N
ZHU DH
KATSUMATA H
KAKEMOTO H
HASEGAWA M
HAYASHI N
SHIBATA H
MAKITA Y
UEKUSA S
TSUKAMOTO T
Citation: N. Kobayashi et al., CRYSTALLIZATION OF SISN AND SISNC LAYERS IN SI BY SOLID-PHASE EPITAXYAND ION-BEAM-INDUCED EPITAXY, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 121(1-4), 1997, pp. 199-202