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Results:
1-7
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Results: 7
Authors:
MULLERZULOW B
MAYWALD M
CRAMER RM
SPRENGEPIEL J
GEHRING S
Citation: B. Mullerzulow et al., METROLOGICAL, ELECTRICAL AND THERMAL-ANALYSIS OF SEMICONDUCTOR STRUCTURES USING SCANNING FORCE MICROSCOPY, Materials science & engineering. B, Solid-state materials for advanced technology, 44(1-3), 1997, pp. 74-77
Authors:
BOHM C
SPRENGEPIEL J
OTTERBECK M
KUBALEK E
Citation: C. Bohm et al., VOLTAGE CONTRAST IN SUBMICRON INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(2), 1996, pp. 842-844
Authors:
SPRENGEPIEL J
BOHM C
KUBALEK E
Citation: J. Sprengepiel et al., DIGITAL SIGNAL MEASUREMENTS ON PASSIVATED SUBMICRON ICS BY SCANNING FORCE MICROSCOPE-TESTING, Microelectronic engineering, 31(1-4), 1996, pp. 181-186
Authors:
MUELLER U
HOFSCHEN S
BOEHM C
SPRENGEPIEL J
KUBALEK E
BEYER A
Citation: U. Mueller et al., FINITE-DIFFERENCE SIMULATION OF ELECTRIC FORCE MICROSCOPE MEASUREMENTS, Microelectronic engineering, 31(1-4), 1996, pp. 235-240
Authors:
BOHM C
SPRENGEPIEL J
KUBALEK E
Citation: C. Bohm et al., DIAGNOSIS IN SUBMICRON INTEGRATED-CIRCUITS BY ELECTRIC FORCE MICROSCOPY, Microelectronics and reliability, 36(7-8), 1996, pp. 1113-1118
Authors:
BOHM C
SPRENGEPIEL J
KUBALEK E
Citation: C. Bohm et al., SCANNING PROBE MICROSCOPE GIGAHERTZ MEASUREMENTS ON 200 NANOMETER WAVE-GUIDES, Scanning microscopy, 9(4), 1995, pp. 965-968
Authors:
BOHM C
SPRENGEPIEL J
KUBALEK E
Citation: C. Bohm et al., VOLTAGE CONTRAST STUDIES ON 0-CENTER-DOT-5 MU-M INTEGRATED-CIRCUITS BY SCANNING FORCE MICROSCOPY, Quality and reliability engineering international, 11(4), 1995, pp. 253-256
Risultati:
1-7
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