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Results:
1-23
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Results: 23
Authors:
BOHER P
STEHLE JL
LABDI S
HOUDY P
Citation: P. Boher et al., TI TIN MULTILAYERS FOR HARD COATINGS APPLICATIONS - IN-SITU CHARACTERIZATION BY REAL-TIME SPECTROSCOPIC ELLIPSOMETRY/, Surface & coatings technology, 101(1-3), 1998, pp. 491-495
Authors:
BOHER P
LUTTMANN M
STEHLE JL
HENNET L
Citation: P. Boher et al., COMBINED CHARACTERIZATION OF CONDUCTIVE MATERIALS BY INFRARED SPECTROSCOPIC ELLIPSOMETRY AND GRAZING X-RAY REFLECTANCE, Thin solid films, 319(1-2), 1998, pp. 67-72
Authors:
BOHER P
STEHLE JL
Citation: P. Boher et Jl. Stehle, ATOMIC-SCALE CHARACTERIZATION OF SEMICONDUCTORS BY IN-SITU REAL-TIME SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 318(1-2), 1998, pp. 120-123
Authors:
LEHNERT W
BERGER R
SCHNEIDER C
PFITZNER L
RYSSEL H
STEHLE JL
PIEL JP
NEUMANN W
Citation: W. Lehnert et al., IN-SITU SPECTROSCOPIC ELLIPSOMETRY FOR ADVANCED PROCESS-CONTROL IN VERTICAL FURNACES, Thin solid films, 313, 1998, pp. 442-445
Authors:
PICKERING C
RUSSELL J
NAYAR V
IMSCHWEILER J
WILLE H
HARRINGTON S
WIGGINS C
STEHLE JL
PIEL JP
BRUCHEZ J
Citation: C. Pickering et al., EVALUATION OF AUTOMATED SPECTROSCOPIC ELLIPSOMETRY FOR IN-LINE PROCESS-CONTROL - ESPRIT SEMICONDUCTOR EQUIPMENT ASSESSMENT (SEA) PROJECT IMPROVE, Thin solid films, 313, 1998, pp. 446-453
Authors:
LUTTMANN M
STEHLE JL
DEFRANOUX C
PIEL JP
Citation: M. Luttmann et al., HIGH-ACCURACY IR ELLIPSOMETER WORKING WITH A GE BREWSTER-ANGLE REFLECTION POLARIZER AND GRID ANALYZER, Thin solid films, 313, 1998, pp. 631-641
Authors:
DEFRANOUX C
PIEL JP
STEHLE JL
Citation: C. Defranoux et al., DEEP ULTRA-VIOLET MEASUREMENTS OF SION ANTIREFLECTIVE COATINGS BY SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 313, 1998, pp. 742-744
Authors:
KISSION K
MOHAMMEDBRAHIM T
BRIAND D
SARRET M
LEBIHAN F
FORTIN B
BONNAUD O
BOHER P
STEHLE M
STEHLE JL
Citation: K. Kission et al., SINGLE-SHOT EXCIMER-LASER CRYSTALLIZATION OF SILICON FILMS DEPOSITED BY LPCVD, Thin solid films, 296(1-2), 1997, pp. 53-56
Authors:
BOHER P
STEHLE JL
HENNET L
Citation: P. Boher et al., COMBINED CHARACTERIZATION OF GROUP-IV HETEROSTRUCTURES AND MATERIALS BY SPECTROSCOPIC ELLIPSOMETRY AND GRAZING X-RAY REFLECTANCE, Thin solid films, 294(1-2), 1997, pp. 37-42
Authors:
BOHER P
STEHLE JL
Citation: P. Boher et Jl. Stehle, IN-SITU SPECTROSCOPIC ELLIPSOMETRY - PRESENT STATUS AND FUTURE-NEEDS FOR THIN-FILM CHARACTERIZATION AND PROCESS-CONTROL, Materials science & engineering. B, Solid-state materials for advanced technology, 37(1-3), 1996, pp. 116-120
Authors:
BOHER P
STEHLE JL
STEHLE M
GODARD B
Citation: P. Boher et al., SINGLE-SHOT EXCIMER-LASER ANNEALING OF AMORPHOUS-SILICON FOR AMLCD, Applied surface science, 96-8, 1996, pp. 376-383
Authors:
BOHER P
STEHLE JL
PIEL JP
FRIED M
LOHNER T
POLGAR O
KHANH NQ
BARSONY I
Citation: P. Boher et al., SPECTROSCOPIC ELLIPSOMETRY APPLIED TO THE DETERMINATION OF AN ION-IMPLANTATION DEPTH PROFILE, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 160-168
Authors:
FRIED M
LOHNER T
POLGAR O
PETRIK P
VAZSONYI E
BARSONY I
PIEL JP
STEHLE JL
Citation: M. Fried et al., CHARACTERIZATION OF DIFFERENT POROUS SILICON STRUCTURES BY SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 276(1-2), 1996, pp. 223-227
Authors:
ZUBER A
KAISER N
STEHLE JL
Citation: A. Zuber et al., VARIABLE-ANGLE SPECTROSCOPIC ELLIPSOMETRY FOR DEEP UV CHARACTERIZATION OF DIELECTRIC COATINGS, Thin solid films, 261(1-2), 1995, pp. 37-43
Authors:
BOHER P
PIEL JP
STEHLE JL
Citation: P. Boher et al., SPECTROSCOPIC ELLIPSOMETRY FOR SI1-XGEX CHARACTERIZATION - COMPARISONWITH OTHER EXPERIMENTAL-TECHNIQUES, Journal of crystal growth, 157(1-4), 1995, pp. 73-79
Authors:
KAMARAS K
BARTH KL
KEILMANN F
HENN R
REEDYK M
THOMSEN C
CARDONA M
KIRCHER J
RICHARDS PL
STEHLE JL
Citation: K. Kamaras et al., THE LOW-TEMPERATURE INFRARED OPTICAL FUNCTIONS OF SRTIO3 DETERMINED BY REFLECTANCE SPECTROSCOPY AND SPECTROSCOPIC ELLIPSOMETRY, Journal of applied physics, 78(2), 1995, pp. 1235-1240
Authors:
ELRHALEB H
ROGER JP
STEHLE JL
BOCCARA AC
Citation: H. Elrhaleb et al., HEAT-FLOW MEASUREMENT IN THIN-FILMS BY TIME-RESOLVED ELLIPSOMETRY, Journal de physique. IV, 4(C7), 1994, pp. 639-642
Authors:
ZALCZER G
THOMAS O
PIEL JP
STEHLE JL
Citation: G. Zalczer et al., IR SPECTROSCOPIC ELLIPSOMETRY - INSTRUMENTATION AND APPLICATIONS IN SEMICONDUCTORS, Thin solid films, 234(1-2), 1993, pp. 356-362
Authors:
JIN G
ELRHALEB H
ROGER JP
BOCCARA AC
STEHLE JL
Citation: G. Jin et al., SPECTROSCOPIC ELLIPSOMETRY UNDER EXTERNAL EXCITATION, Thin solid films, 234(1-2), 1993, pp. 375-379
Authors:
HUMLICEK J
KAMARAS K
KIRCHER J
HABERMEIER HU
CARDONA M
ROSELER A
STEHLE JL
Citation: J. Humlicek et al., MID-IR AND NEAR-IR ELLIPSOMETRY OF Y1-XPRXBA2CU3O7 EPITAXIAL-FILMS, Thin solid films, 234(1-2), 1993, pp. 518-521
Authors:
PICKERING C
CARLINE RT
GARAWAL NS
STEHLE JL
PIEL JP
BLUNT R
KIRBY P
Citation: C. Pickering et al., NONDESTRUCTIVE CHARACTERIZATION OF III-V ALLOY MULTILAYER STRUCTURES USING SPECTROSCOPIC ELLIPSOMETRY, Thin solid films, 233(1-2), 1993, pp. 171-175
Authors:
PIEL JP
STEHLE JL
THOMAS O
Citation: Jp. Piel et al., THE FASTEST REAL-TIME SPECTROSCOPIC ELLIPSOMETRY - APPLICATIONS AND LIMITATIONS FOR IN-SITU AND QUALITY-CONTROL, Thin solid films, 233(1-2), 1993, pp. 301-306
Authors:
JIN G
ROGER JP
BOCCARA AC
STEHLE JL
Citation: G. Jin et al., PROBING DYNAMIC PROCESSES IN MULTILAYERED STRUCTURES BY STIMULATED SPECTROSCOPIC ELLIPSOMETRY, Journal of physics. D, Applied physics, 26(11), 1993, pp. 2096-2099
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1-23
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