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Results: 1-20 |
Results: 20

Authors: Nieminen, M Sajavaara, T Rauhala, E Putkonen, M Niinisto, L
Citation: M. Nieminen et al., Surface-controlled growth of LaAlO3 thin films by atomic layer epitaxy, J MAT CHEM, 11(9), 2001, pp. 2340-2345

Authors: Vehkamaki, M Hanninen, T Ritala, M Leskela, M Sajavaara, T Rauhala, E Keinonen, J
Citation: M. Vehkamaki et al., Atomic layer deposition of SrTiO3 thin films from a novel strontium precursor-strontium-bis(tri-isopropylcyclopentadienyl), CHEM VAPOR, 7(2), 2001, pp. 75-80

Authors: Putkonen, M Sajavaara, T Johansson, LS Niinisto, L
Citation: M. Putkonen et al., Low-temperature ALE deposition of Y2O3 thin films from beta-diketonate precursors, CHEM VAPOR, 7(1), 2001, pp. 44-50

Authors: Koskinen, J Ronkainen, H Varjus, S Muukkonen, T Holmberg, K Sajavaara, T
Citation: J. Koskinen et al., Low friction ta-C films with hydrogen reservoirs, DIAM RELAT, 10(3-7), 2001, pp. 1030-1035

Authors: Gago, R Jimenez, I Sajavaara, T Rauhala, E Albella, JM
Citation: R. Gago et al., X-Ray absorption studies of cubic boron-carbon-nitrogen films grown by ionbeam assisted evaporation, DIAM RELAT, 10(3-7), 2001, pp. 1165-1169

Authors: Gago, R Jimenez, I Caceres, D Agullo-Rueda, F Sajavaara, T Albella, JM Climent-Font, A Vergara, I Raisanen, J Rauhala, E
Citation: R. Gago et al., Hardening mechanisms in graphitic carbon nitride films grown with N-2/Ar ion assistance, CHEM MATER, 13(1), 2001, pp. 129-135

Authors: Arstila, K Sajavaara, T Keinonen, J
Citation: K. Arstila et al., Monte Carlo simulation of multiple and plural scattering in elastic recoildetection, NUCL INST B, 174(1-2), 2001, pp. 163-172

Authors: Vainonen-Ahlgren, E Ahlgren, T Likonen, J Lehto, S Sajavaara, T Rydman, W Keinonen, J Wu, CH
Citation: E. Vainonen-ahlgren et al., Deuterium diffusion in silicon-doped diamondlike carbon films - art. no. 045406, PHYS REV B, 6304(4), 2001, pp. 5406

Authors: Guina, M Xiang, N Vainionpaa, A Okhotnikov, OG Sajavaara, T Keinonen, J
Citation: M. Guina et al., Self-starting stretched-pulse fiber laser mode locked and stabilized with slow and fast semiconductor saturable absorbers, OPTICS LETT, 26(22), 2001, pp. 1809-1811

Authors: Alen, P Juppo, M Ritala, M Sajavaara, T Keinonen, J Leskela, M
Citation: P. Alen et al., Atomic layer deposition of Ta(Al)N(C) thin films using trimethylaluminum as a reducing agent, J ELCHEM SO, 148(10), 2001, pp. G566-G571

Authors: Putkonen, M Sajavaara, T Niinisto, L
Citation: M. Putkonen et al., Enhanced growth rate in atomic layer epitaxy deposition of magnesium oxidethin films, J MAT CHEM, 10(8), 2000, pp. 1857-1861

Authors: Kukli, K Ritala, M Schuisky, M Leskela, M Sajavaara, T Keinonen, J Uustare, T Harsta, A
Citation: K. Kukli et al., Atomic layer deposition of titanium oxide from TiI4 and H2O2, CHEM VAPOR, 6(6), 2000, pp. 303-310

Authors: Sajavaara, T Arstila, K Laakso, A Keinonen, J
Citation: T. Sajavaara et al., Effects of surface roughness on results in elastic recoil detection measurements, NUCL INST B, 161, 2000, pp. 235-239

Authors: Matero, R Rahtu, A Ritala, M Leskela, M Sajavaara, T
Citation: R. Matero et al., Effect of water dose on the atomic layer deposition rate of oxide thin films, THIN SOL FI, 368(1), 2000, pp. 1-7

Authors: Ritala, M Kukli, K Rahtu, A Raisanen, PI Leskela, M Sajavaara, T Keinonen, J
Citation: M. Ritala et al., Atomic layer deposition of oxide thin films with metal alkoxides as oxygensources, SCIENCE, 288(5464), 2000, pp. 319-321

Authors: Khriachtchev, L Vainonen-Ahlgren, E Sajavaara, T Ahlgren, T Keinonen, J
Citation: L. Khriachtchev et al., Stability of Si-C films prepared by a pulsed arc discharge method: Thermaltreatment and heavy-ion irradiation, J APPL PHYS, 88(4), 2000, pp. 2118-2124

Authors: Kemell, M Ritala, M Saloniemi, H Leskela, M Sajavaara, T Rauhala, E
Citation: M. Kemell et al., One-step electrodeposition of Cu2-xSe and CuInSe2 thin films by the induced co-deposition mechanism, J ELCHEM SO, 147(3), 2000, pp. 1080-1087

Authors: Rissanen, L Schaaf, P Neubauer, M Lieb, KP Keinonen, J Sajavaara, T
Citation: L. Rissanen et al., The production of the new cubic FeN phase by reactive magnetron sputtering, APPL SURF S, 139, 1999, pp. 261-265

Authors: Zhang, YW Whitlow, HJ Winzell, T Bubb, IF Sajavaara, T Arstila, K Keinonen, J
Citation: Yw. Zhang et al., Detection efficiency of time-of-flight energy elastic recoil detection analysis systems, NUCL INST B, 149(4), 1999, pp. 477-489

Authors: Sajavaara, T Lappalainen, R Arstila, K Li, WM Ritala, M Leskela, M Soininen, E
Citation: T. Sajavaara et al., Modification of ALE-grown SrS thin films by ion implantation of Cu and codopants, NUCL INST B, 148(1-4), 1999, pp. 715-719
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