Authors:
Dennler, G
Houdayer, A
Latreche, M
Segui, Y
Wertheimer, MR
Citation: G. Dennler et al., Studies of the earliest stages of plasma-enhanced chemical vapor deposition of SiO2 on polymeric substrates, THIN SOL FI, 382(1-2), 2001, pp. 1-3
Citation: P. Raynaud et al., Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance, APPL SURF S, 139, 1999, pp. 285-291
Authors:
Raynaud, P
Marliere, C
Berthomieux, D
Segui, Y
Durand, J
Burke, R
Citation: P. Raynaud et al., Infrared absorption analysis of organosilicon/oxygen plasmas in a microwave multipolar plasma excited by distributed electron cyclotron resonance, J PHYS IV, 8(P7), 1998, pp. 265-272