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Authors:
Schneider, G
Hambach, D
Niemann, B
Kaulich, B
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Hasse, W
Citation: G. Schneider et al., In situ x-ray microscopic observation of the electromigration in passivated Cu interconnects, APPL PHYS L, 78(13), 2001, pp. 1936-1938
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Authors:
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Salome, M
Barrett, R
Susini, J
Wilhein, T
Di Fabrizio, E
Gentili, M
Charalambous, P
Citation: B. Kaulich et al., Feasibility of transmission x-ray microscopy at 4 keV with spatial resolutions below 150 nm, APPL PHYS L, 75(26), 1999, pp. 4061-4063