Authors:
IKARI A
IZUNOME K
KAWANISHI S
TOGAWA S
TERASHIMA K
KIMURA S
Citation: A. Ikari et al., INFLUENCE OF THE THERMAL HISTORY OF MELTS ON THE FORMATION OF GROWN-IN DEFECTS IN SILICON, Journal of crystal growth, 167(1-2), 1996, pp. 361-364
Authors:
TOGAWA S
IZUNOME K
KAWANISHI S
CHUNG SI
TERASHIMA K
KIMURA S
Citation: S. Togawa et al., OXYGEN-TRANSPORT FROM A SILICA CRUCIBLE IN CZOCHRALSKI SILICON GROWTH, Journal of crystal growth, 165(4), 1996, pp. 362-371
Authors:
TOGAWA S
CHUNG SI
KAWANISHI S
IZUNOME K
TERASHIMA K
KIMURA S
Citation: S. Togawa et al., DENSITY ANOMALY EFFECT UPON SILICON MELT FLOW DURING CZOCHRALSKI CRYSTAL-GROWTH .1. UNDER THE GROWTH INTERFACE, Journal of crystal growth, 160(1-2), 1996, pp. 41-48
Authors:
TOGAWA S
CHUNG SI
KAWANISHI S
IZUNOME K
TERASHIMA K
KIMURA S
Citation: S. Togawa et al., DENSITY ANOMALY EFFECT UPON SILICON MELT FLOW DURING CZOCHRALSKI CRYSTAL-GROWTH .2. TIME-TOPICAL FLOW STRUCTURE UNDER THE GROWTH INTERFACE, Journal of crystal growth, 160(1-2), 1996, pp. 49-54
Authors:
KAWANISHI S
TOGAWA S
IZUNOME K
TERASHIMA K
KIMURA S
Citation: S. Kawanishi et al., INFLUENCE OF SURFACE MELT FLOW ON OXYGEN INHOMOGENEITY IN CZOCHRALSKI-GROWN SILICON SINGLE-CRYSTAL - STUDIED BY DOUBLE-LAYERED CZOCHRALSKI (DLCZ) MELT QUENCHING TECHNIQUE, JPN J A P 1, 34(11), 1995, pp. 5885-5890
Authors:
KAWANISHI S
TOGAWA S
IZUNOME K
TERASHIMA K
KIMURA S
Citation: S. Kawanishi et al., MELT QUENCHING TECHNIQUE FOR DIRECT OBSERVATION OF OXYGEN-TRANSPORT IN THE CZOCHRALSKI-GROWN SI PROCESS, Journal of crystal growth, 152(4), 1995, pp. 266-273
Authors:
IZUNOME K
HUANG XM
TOGAWA S
TERASHIMA K
KIMURA S
Citation: K. Izunome et al., CONTROL OF OXYGEN CONCENTRATION IN HEAVILY ANTIMONY-DOPED CZOCHRALSKISI CRYSTALS BY AMBIENT ARGON PRESSURE, Journal of crystal growth, 151(3-4), 1995, pp. 291-294
Authors:
TOGAWA S
HUANG XM
IZUNOME K
TERASHIMA K
KIMURA S
Citation: S. Togawa et al., OXYGEN-TRANSPORT ANALYSIS IN CZOCHRALSKI SILICON MELT BY CONSIDERING THE OXYGEN EVAPORATION FROM THE MELT SURFACE, Journal of crystal growth, 148(1-2), 1995, pp. 70-78
Authors:
TOGAWA S
SHIRAISHI Y
TERASHIMA K
KIMURA S
Citation: S. Togawa et al., OXYGEN-TRANSPORT MECHANISM IN CZOCHRALSKI SILICON MELT .1. THE WHOLE BULK MELT, Journal of the Electrochemical Society, 142(8), 1995, pp. 2839-2844
Authors:
TOGAWA S
SHIRAISHI Y
TERASHIMA K
KIMURA S
Citation: S. Togawa et al., OXYGEN-TRANSPORT MECHANISM IN CZOCHRALSKI SILICON MELT .2. VICINITY OF GROWTH INTERFACE, Journal of the Electrochemical Society, 142(8), 1995, pp. 2844-2848