Authors:
Tseng, HH
Veteran, J
Tobin, PJ
Mogab, J
Tsui, PGY
Wang, V
Khare, M
Wang, XW
Ma, TP
Hobbs, C
Hegde, R
Hartig, M
Kenig, G
Blumenthal, R
Cotton, R
Kaushik, V
Tamagawa, T
Halpern, BL
Cui, GJ
Schmitt, JJ
Citation: Hh. Tseng et al., Jet vapor deposition nitride processing and application to advanced CMOS devices for reduction of gate leakage current and boron penetration, MAT SC S PR, 3(3), 2000, pp. 173-178
Authors:
Maiti, B
Tobin, PJ
Hegde, RI
Ajuria, SA
Chang, KT
Paulson, W
Citation: B. Maiti et al., The effect of preoxide quality of furnace-grown N2O oxynitride on charge-to-breakdown and Program/Erase endurance in EEPROM, EL SOLID ST, 1(3), 1998, pp. 147-149